Complementary Metal Oxide Semiconductor Cantilever Arrays on a Single Chip: Mass-Sensitive Detection of Volatile Organic Compounds
Lange, Dirk, Hagleitner, Christoph, Hierlemann, Andreas, Brand, Oliver, Baltes, Henry
Published in Analytical chemistry (Washington) (01.07.2002)
Published in Analytical chemistry (Washington) (01.07.2002)
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Journal Article
Using Reactands in CMOS-based Calorimetric Sensors: New Functional Materials for Electronic Noses
MOHR, Gerhard J., ZHYLYAK, Gleb, NEZEL, Tomas, SPICHIGER-KELLER, Ursula E., KERNESS, Nicole, BRAND, Oliver, BALTES, Henry, GRUMMT, Ulrich-W.
Published in Analytical Sciences (2002)
Published in Analytical Sciences (2002)
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Journal Article
Microfabrication techniques for chemical/biosensors
Hierlemann, A., Brand, O., Hagleitner, C., Baltes, H.
Published in Proceedings of the IEEE (01.06.2003)
Published in Proceedings of the IEEE (01.06.2003)
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Journal Article
Resonant Magnetic Field Sensor With Frequency Output
Sunier, R., Vancura, T., Yue Li, Kirstein, K.-U., Baltes, H., Brand, O.
Published in Journal of microelectromechanical systems (01.10.2006)
Published in Journal of microelectromechanical systems (01.10.2006)
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Journal Article
Process-dependent thin-film thermal conductivities for thermal CMOS MEMS
von Arx, M., Paul, O., Baltes, H.
Published in Journal of microelectromechanical systems (01.03.2000)
Published in Journal of microelectromechanical systems (01.03.2000)
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Journal Article
Hotplate-based monolithic CMOS microsystems for gas detection and material characterization for operating temperatures up to 500°C
Barrettino, D, Graf, M, Song, Wan Ho, Kirstein, K.-U, Hierlemann, A, Baltes, H
Published in IEEE journal of solid-state circuits (01.07.2004)
Published in IEEE journal of solid-state circuits (01.07.2004)
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Journal Article
CMOS monolithic metal-oxide sensor system comprising a microhotplate and associated circuitry
Graf, M., Barrettino, D., Zimmermann, M., Hierlemann, A., Baltes, H., Hahn, S., Barsan, N., Weimar, U.
Published in IEEE sensors journal (01.02.2004)
Published in IEEE sensors journal (01.02.2004)
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Journal Article
Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array
Schaufelbuhl, A., Schneeberger, N., Munch, U., Waelti, M., Paul, O., Brand, O., Baltes, H., Menolfi, C., Qiuting Huang, Doering, E., Loepfe, M.
Published in Journal of microelectromechanical systems (01.12.2001)
Published in Journal of microelectromechanical systems (01.12.2001)
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Journal Article
Strongly buckled square micromachined membranes
Ziebart, V., Paul, O., Baltes, H.
Published in Journal of microelectromechanical systems (01.12.1999)
Published in Journal of microelectromechanical systems (01.12.1999)
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