Surface Acoustic Wave Humidity Sensors Based on Graphene Oxide Thin Films Deposited with the Surface Acoustic Wave Atomizer
Balashov, S. M., Balachova, O. V., Filho, Aristides Pavani, Bazetto, Maria Cecília Q., de Almeida, M. G.
Published in ECS transactions (01.01.2012)
Published in ECS transactions (01.01.2012)
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Journal Article
SAW Sensors and RF ID Tags without a Reference Channel
Balashov, Sergey, Balachova, O.V., Pavani Filho, A., Swart, J. W.
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Journal Article
The optimized SAW humidity sensor with nanofilms of graphene oxide
Balashov, S. M., Balachova, O. V., Braga, A. V. U., Bazetto, M. C. Q., Pavani Filho, A.
Published in 2013 IEEE SENSORS (01.11.2013)
Published in 2013 IEEE SENSORS (01.11.2013)
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Conference Proceeding
CF4 plasma etching of materials used in microelectronics manufacturing
Balachova, O.V, Alves, M.A.R, Swart, J.W, Braga, E.S, Cescato, L
Published in Microelectronics (01.03.2000)
Published in Microelectronics (01.03.2000)
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Journal Article
Kinetic characteristics of the SAW humidity sensor partially coated with graphene oxide thin film
Balashov, S. M., Balachova, O. V., Braga, A. V. U., Bazetto, M. C. Q., Pavani Filho, A., Moshkalev, S.
Published in 28th Symposium on Microelectronics Technology and Devices (SBMicro 2013) (01.09.2013)
Published in 28th Symposium on Microelectronics Technology and Devices (SBMicro 2013) (01.09.2013)
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Conference Proceeding
CF sub(4) plasma etching of materials used in microelectronics manufacturing
Balachova, O V, Alves, M A R, Swart, J W, Braga, E S, Cescato, L
Published in Microelectronics (01.01.2000)
Get full text
Published in Microelectronics (01.01.2000)
Journal Article