Deep multilevel wet etching of fused silica glass microstructures in BOE solution
Konstantinova, T. G., Andronic, M. M., Baklykov, D. A., Stukalova, V. E., Ezenkova, D. A., Zikiy, E. V., Bashinova, M. V., Solovev, A. A., Lotkov, E. S., Ryzhikov, I. A., Rodionov, I. A.
Published in Scientific reports (30.03.2023)
Published in Scientific reports (30.03.2023)
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Journal Article
Tunable low-loss silicon nitride integrated circuits
Baburin, A.S., Lotkov, E.S., Sergeev, E.V., Andronic, M., Baklykov, D. A., Stukalova, V. E., Buzaverov, K. A., Avdeev, S.S, Ryzhikov, I.A., Dyakonov, I.V., Skryabin, N., Saygin, M. Yu, Kulik, S.P., Rodionov, I.A.
Published in 2022 International Conference Laser Optics (ICLO) (20.06.2022)
Published in 2022 International Conference Laser Optics (ICLO) (20.06.2022)
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Conference Proceeding
Deep multilevel wet etching of fused silica glass microstructures in BOE solution
Konstantinova, T. G, Andronic, M. M, Baklykov, D. A, Stukalova, V. E, Ezenkova, D. A, Zikiy, E. V, Bashinova, M. V, Solovev, A. A, Lotkov, E. S, Ryzhikov, I. A, Rodionov, I. A
Year of Publication 13.12.2022
Year of Publication 13.12.2022
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Journal Article
Deep multilevel wet etching of fused silica glass microstructures in BOE solution
Konstantinova, T G, Andronic, M M, Baklykov, D A, Stukalova, V E, Ezenkova, D A, Zikiy, E V, Bashinova, M V, Solovev, A A, Lotkov, E S, Ryzhikov, I A, Rodionov, I A
Published in arXiv.org (13.12.2022)
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Published in arXiv.org (13.12.2022)
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