Search Results - "Bakker, Levinus Pieter" :: K.UTB vyhledávací portál

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MIRROR HAVING AT LEAST TWO PROJECTION PARTS, LITHOGRAPHY PROJECTION APPARATUS CONTAINING THE MIRROR, AND PREPARATION METHOD OF DEVICE USING THE MIRROR

by BAKKER, LEVINUS PIETER
Year of Publication 17.01.2005

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LITHOGRAPHIC APPARATUS HAVING DEBRIS SUPPRESSION UNIT FOR REMOVING UNNECESSARY MATERIALS(DEBRIS) BY RADIATION SOURCE AND DEVICE MANUFACTURING METHOD

by BAKKER LEVINUS PIETER
Year of Publication 30.06.2004

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RADIATION SOURCE APPARATUS, LITHOGRAPHIC APPARATUS, ILLUMINATION SYSTEM AND METHOD FOR MITIGATING DEBRIS PARTICLES

by BAKKER LEVINUS PIETER, SCHUURMANS FRANK JEROEN PIETER, MOORS JOHANNES HUBERTUS J, VADIM YEVGENYEVICH BANINE, KOLESNYCHENKO ALEKSEY YURIEVICH
Year of Publication 11.06.2015

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LITHOGRAPHY PROJECTION APPARATUS EMPLOYING A PLURALITY OF INHIBITING HIGH VOLTAGE MESHES TO REDUCE NUMBER OF FREE ELECTRONS REACHING OPTICAL CONSTITUTING UNIT AND PREPARATION METHOD OF INTEGRATED CIRCUIT

by BAKKER LEVINUS PIETER, SCHUURMANS FRANK JEROEN PIETER
Year of Publication 01.06.2004

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LITHOGRAPHY PROJECTION APPARATUS AND REFLECTOR ASSEMBLY USED IN THE APPARATUS TO REDUCE THERMAL LOAD OF RADIATION RAY FOR PREVENTING BREAKING OF COLLECTORS

by BAKKER LEVINUS PIETER, SCHUURMANS FRANK JEROEN PIETER
Year of Publication 09.04.2004

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LITHOGRAPHIC PROJECTION APPARATUS WITH SECONDARY ELECTRON REMOVING UNIT

by BAKKER LEVINUS PIETER, SCHUURMANS FRANK JEROEN PIETER, KURT RALPH
Year of Publication 28.04.2004

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LITHOGRAPHY PROJECTION APPARATUS HAVING FOIL TRAP(PARTICLE BARRIER) TO REDUCE NUMBER OF PARTICLE EMITTED BY EUV SOURCE AND TRANSMITTED ALONG OPTICAL AXIS LINE

by BAKKER LEVINUS PIETER, BANINE VADIM YEVGENYEVICH, SCHUURMANS FRANK JEROEN PIETER
Year of Publication 09.04.2004

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LASER GENERATING PLASMA RADIATION SYSTEM WITH FOIL TRAP TO PREVENT COLLECTOR FROM BEING CONTAMINATED BY PARTICLES FROM RADIATION SOURCE WHILE NOT DISTURBING RADIOACTIVE RAYS

by SIDELNIKOV, YURII VICTOROVITCH, BAKKER, LEVINUS PIETER, SCHUURMANS, FRANK JEROEN PIETER, BANINE, VADIM YEVGENYEVICH, KURT, RALPH
Year of Publication 06.01.2005

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SYSTEM AND METHOD FOR CLEANING SURFACE PARTICLES OF COMPONENT IN LITHOGRAPHIC PROJECTION DEVICE FOR PREVENTING DEGRADATION OF OPTICAL PROPERTIES OF OPTICAL COMPONENTS, LITHOGRAPHIC PROJECTION DEVICE, AND MANUFACTURING METHOD OF DEVICE

by BAKKER LEVINUS PIETER, MERTENS BASTIAAN MATTHIAS, TRENKLER JOHANN, SINGER WOLFGANG, KURT RALPH, WEISS MARKUS
Year of Publication 26.06.2004

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LITHOGRAPHY PROJECTION APPARATUS, REFLECTOR ASSEMBLY USED IN THE APPARATUS AND RADIANT RAY SOURCE HAVING DEBRIS INHIBITING SYSTEM WITH LITTLE EFFECT ON EUV TRANSPARENCY

by BAKKER LEVINUS PIETER, JONKERS JEROEN, SCHUURMANS FRANK JEROEN PIETER, VISSER HUGO MATTIEU
Year of Publication 09.04.2004

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CONTAMINATION BARRIER WITH EXPANDABLE LAMELLA FOR COATING DEBRIS FROM RADIATION SOURCE

by BAKKER LEVINUS PIETER, BOX WILHELMUS JOSEPHUS, DIERICHS MARCEL MATHIJS THEODORE MARIE, SCHUURMANS FRANK JEROEN PIETER, VIJFVINKEL JAKOB, FRERIKS JOHANNES MARIA
Year of Publication 03.07.2004

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LITHOGRAPHIC APPARATUS DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY

by BAKKER LEVINUS PIETER, BANINE VADIM YEVGENYEVICH, VAN ELP JAN, LEENDERS MARTINUS HENDRIKUS ANTONIUS, VISSER HUGO MATTHIEU
Year of Publication 17.04.2002

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LITHOGRAPHY APPARATUS WITH DOWNSTREAM RADICAL SOURCE AND METHOD OF MANUFACTURING DEVICE

by BAKKER LEVINUS PIETER, WOLTERS ROBERTUS ADRIANUS MARIA, JONKERS JEROEN, KROON MARK, BISSCHOPS THEODORUS HUBERTUS JOSEPHUS, VANBEEK MICHAEL CORNELIS, MAAS ADRIANUS JOHANNES HENRICUS
Year of Publication 22.06.2004

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LITHOGRAPHY APPARATUS AND METHOD FOR FABRICATING DEVICE TO REDUCE RESIDUAL LIQUID LEFT ON SUBSTRATE AFTER EXPOSURE PROCESS IS PERFORMED BY PROJECTION SYSTEM

by BAKKER LEVINUS PIETER, STRAAIJER ALEXANDER, VANNUNEN GERARDUS PETRUS MATTHIJS, VANDERMEULEN FRITS, BASELMANS JOHANNES JACOBUS MATHEUS, HOOGENDAM CHRISTIAAN ALEXANDER, MULKENS JOHANNES CATHARINUS HUBERTUS, SLAGHEKKE BERNARDUS ANTONIUS, STREEFKERK BOB, SIMON KLAUS, MERTENS JEROEN JOHANNES SOPHIA MARIA, VANDERTOORN JAN GERARD CORNELIS, LOOPSTRA ERIK ROELOF, HOUKES MARTIJN, COX HENRIKUS HERMAN MARIE, DONDERS SJOERD NICOLAAS LAMBERTUS, DERKSEN ANTONIUS THEODORUS ANNA MARIA, LOF JOERI
Year of Publication 20.11.2004

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