Plasma Deposition and Properties of Silicon Carbonitride Films
Smirnova, T. P., Badalyan, A. M., Borisov, V. O., Kaichev, V. V., Bakhturova, L. F., Kichai, V. N., Rakhlin, V. I., Shainyan, B. A.
Published in Inorganic materials (01.07.2005)
Published in Inorganic materials (01.07.2005)
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Plasma-chemical deposition of SiCN films from volatile N-bromhexamethyldisilazane
Smirnova, T. P., Badalian, A. M., Borisov, V. O., Bakhturova, L. F., Kaichev, V. V., Podgorbunskaya, T. A., Rakhlin, V. I.
Published in Inorganic materials (01.12.2008)
Published in Inorganic materials (01.12.2008)
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New technique for heterogeneous vapor-phase synthesis of nanostructured metal layers from low-dimensional volatile metal complexes
Badalyan, A. M., Bakhturova, L. F., Kaichev, V. V., Polyakov, O. V., Pchelyakov, O. P., Smirnov, G. I.
Published in Technical physics (01.09.2011)
Published in Technical physics (01.09.2011)
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Surface microstructure and morphology study of thin films produced from volatile fluorine-containing rare-earth β-diketonate complexes and their adducts
Nikulina, L. D., Bakhturova, L. F., Danilovich, V. S.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.12.2007)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.12.2007)
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Formation of thin nanostructured layers during heterogeneous gas-phase synthesis from small-size volatile metal complexes on the surface of semiconductors and dielectrics
Badalyan, A. M., Bakhturova, L. F., Kaichev, V. V., Kashnikov, B. P., Polyakov, O. V., Pchelyakov, O. P., Smirnov, G. I.
Published in Technical physics letters (01.03.2010)
Published in Technical physics letters (01.03.2010)
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On the mechanism of remote plasma-enhanced chemical vapor deposition of films
Polyakov, O. V., Badalyan, A. M., Bakhturova, L. F., Borisov, V. O.
Published in High energy chemistry (01.07.2008)
Published in High energy chemistry (01.07.2008)
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Molar extinction coefficients of IR absorption bands of Cu(II) dipivaloylmethanate
Bakhturova, L. F., Bakovets, V. V., Levashova, T. M., Dolgovesova, I. P., Borisov, V. O.
Published in Journal of applied spectroscopy (01.01.2000)
Published in Journal of applied spectroscopy (01.01.2000)
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Molar coefficients of extinction for IR absorption bands of Ni(II) acetylacetonate, ketoiminate, and trifluoroacetylacetonate
Bakovets, V. V., Bakhturova, L. F., Levashova, T. M., Dolgovesova, I. P., Borisov, V. O.
Published in Journal of applied spectroscopy (01.09.1998)
Published in Journal of applied spectroscopy (01.09.1998)
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Chemical vapor deposition of Y2O3 films using Y(dpm)3
BAKOVETS, V. V, LEVASHOVA, T. M, RATUSHNYAK, V. T, BAKHTUROVA, L. F
Published in Inorganic materials (2002)
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Published in Inorganic materials (2002)
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