Method of automatic fluid dispensing for imprint lithography processes
COLBURN MATTHERW E, WILLSON CARLTON GRANT, EKERDT JOHN G, BAILEY TODD C, CHOI BYUNG-JIN, SREENIVASAN SIDLGATA V
Year of Publication 29.12.2015
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Year of Publication 29.12.2015
Patent
IMPRINT LITHOGRAPHY TEMPLATES HAVING ALIGNMENT MARKS
STEPHEN C. JOHNSON, BRITAIN J. SMITH, JOHN G. EKERDT, MATTHEW E. COLBURN, BYUNG-JIN CHOI, TODD C. BAILEY, CARLTON G. WILLSON, SIDLGATA V. SREENIVASAN
Year of Publication 30.06.2015
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Year of Publication 30.06.2015
Patent