Improved high-temperature stability of Si incorporated a-C:H films
Camargo, S.S, Baia Neto, A.L, Santos, R.A, Freire, F.L, Carius, R, Finger, F
Published in Diamond and related materials (01.08.1998)
Published in Diamond and related materials (01.08.1998)
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Journal Article
Structural modifications and temperature stability of silicon incorporated diamond-like a-C:H films
CAMARGO, S. S, SANTOS, R. A, BAIA, A. L, CARIUS, R, FINGER, F
Published in Thin solid films (02.11.1998)
Published in Thin solid films (02.11.1998)
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Conference Proceeding
Journal Article
Relation between mechanical and structural properties of silicon-incorporated hard a-C:H films
Baia Neto, A.L., Santos, R.A., Freire, F.L., Camargo, S.S., Carius, R., Finger, F., Beyer, W.
Published in Thin solid films (01.01.1997)
Published in Thin solid films (01.01.1997)
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Journal Article
Annealing effects on near stoichiometric a-SiC:H films
Baia Neto, A.L., Camargo, S.S., Carius, R., Finger, F., Beyer, W.
Published in Surface & coatings technology (01.11.1999)
Published in Surface & coatings technology (01.11.1999)
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Journal Article
Microcrystalline silicon prepared with hot-wire CVD
Finger, F, Klein, S, Carius, R, Dylla, T, Vetterl, O, Neto, A L B
Published in Journal of materials science. Materials in electronics (01.10.2003)
Published in Journal of materials science. Materials in electronics (01.10.2003)
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Journal Article