Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate
Bahette, E, Michaud, J F, Certon, D, Gross, D, Perroteau, M, Alquier, D
Published in Journal of micromechanics and microengineering (01.11.2016)
Published in Journal of micromechanics and microengineering (01.11.2016)
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Journal Article
Single and multilayered materials processing by argon ion beam etching: study of ion angle incidence and defect formation
Gosset, N, Boufnichel, M, Bahette, E, Khalfaoui, W, Ljazouli, R, Grimal-Perrigouas, V, Dussart, R
Published in Journal of micromechanics and microengineering (01.09.2015)
Published in Journal of micromechanics and microengineering (01.09.2015)
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Journal Article
Progresses in cMUT device fabrication using low temperature processes
Bahette, E, Michaud, J F, Certon, D, Gross, D, Alquier, D
Published in Journal of micromechanics and microengineering (01.04.2014)
Published in Journal of micromechanics and microengineering (01.04.2014)
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Journal Article