Enhancement-Mode Metal Organic Chemical Vapor Deposition-Grown ZnO Thin-Film Transistors on Glass Substrates Using N2O Plasma Treatment
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Published in Jpn J Appl Phys (01.04.2010)
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HIGH-RATE DRY ETCHING OF ZnO IN BCl3/CH4/H2 PLASMAS
Bae, J-W, Jeong, C-H, Kim, H-K, Kim, K-K, Cho, N-G, Seong, T-Y, Park, S-J
Published in Jpn.J.Appl.Phys ,Part 2. Vol. 42, no. 5B, pp. L535-L537. 2003 (15.05.2003)
Published in Jpn.J.Appl.Phys ,Part 2. Vol. 42, no. 5B, pp. L535-L537. 2003 (15.05.2003)
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Journal Article