High-capacity, self-assembled metal-oxide-semiconductor decoupling capacitors
Black, C.T., Guarini, K.W., Ying Zhang, Hyungjun Kim, Benedict, J., Sikorski, E., Babich, I.V., Milkove, K.R.
Published in IEEE electron device letters (01.09.2004)
Published in IEEE electron device letters (01.09.2004)
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Journal Article
Hybrid lithography: The marriage between optical and e-beam lithography. A method to study process integration and device performance for advanced device nodes
Steen, Steven, McNab, Sharee J., Sekaric, Lidija, Babich, Inna, Patel, Jyotica, Bucchignano, Jim, Rooks, Michael, Fried, David M., Topol, Anna W., Brancaccio, Jim R., Yu, Roy, Hergenrother, John M., Doyle, James P., Nunes, Ron, Viswanathan, Raman G., Purushothaman, Sampath, Rothwell, Mary Beth
Published in Microelectronic engineering (01.04.2006)
Published in Microelectronic engineering (01.04.2006)
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Journal Article
Conference Proceeding
Measurement of the effective wavelength of x-ray lithography sources
Maldonado, Juan R., Babich, Inna, Hsia, L.C., Rippstein, R., Flamholz, A., DiMilia, Vincent
Published in Microelectronic engineering (01.04.1993)
Published in Microelectronic engineering (01.04.1993)
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Journal Article
Forming a pattern of a negative photoresist
Babich, Edward, Angelopoulos, Marie, Babich, Inna, Babich, Katherina, Bucchignano, James, Petrillo, Karen, Rishton, Steven
Year of Publication 05.09.2002
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Year of Publication 05.09.2002
Patent
Forming a pattern of a negative photoresist
Angelopoulos, Marie, Babich, Edward D, Babich, Inna V, Babich, Katherina E, Bucchignano, James J, Petrillo, Karen E, Rishton, Steven A
Year of Publication 09.09.2003
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Year of Publication 09.09.2003
Patent
Forming a pattern of a negative photoresist
BABICH INNA V, PETRILLO KAREN E, BABICH EDWARD D, BABICH KATHERINA E, BUCCHIGNANO JAMES J, RISHTON STEVEN A, ANGELOPOULOS MARIE
Year of Publication 09.09.2003
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Year of Publication 09.09.2003
Patent
Forming a pattern of a negative photoresist
BABICH INNA V, PETRILLO KAREN E, BABICH EDWARD D, BABICH KATHERINA E, BUCCHIGNANO JAMES J, RISHTON STEVEN A, ANGELOPOULOS MARIE
Year of Publication 05.09.2002
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Year of Publication 05.09.2002
Patent
Forming a pattern of a negative photoresist
BABICH INNA V, PETRILLO KAREN E, BABICH EDWARD D, BABICH KATHERINA E, BUCCHIGNANO JAMES J, RISHTON STEVEN A, ANGELOPOULOS MARIE
Year of Publication 26.06.2001
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Year of Publication 26.06.2001
Patent
Energy sensitive electrically conductive admixtures
MOREAU; WAYNE MARTIN, ANGELOPOULOS; MARIE, BABICH; INNA V, SEEGER; DAVID E, BABICH; EDWARD D, CHEN; KUANG-JUNG
Year of Publication 17.10.2000
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Year of Publication 17.10.2000
Patent