On the homogeneity of sputter-deposited ITO films Part I. Stress and microstructure
Vink, T.J., Walrave, W., Daams, J.L.C., Baarslag, P.C., van den Meerakker, J.E.A.M.
Published in Thin solid films (01.10.1995)
Published in Thin solid films (01.10.1995)
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Journal Article
On the homogeneity of sputter-deposited ITO films Part II. Etching behaviour
van den Meerakker, J.E.A.M., Baarslag, P.C., Walrave, W., Vink, T.J., Daams, J.L.C.
Published in Thin solid films (01.10.1995)
Published in Thin solid films (01.10.1995)
Get full text
Journal Article