Coating method based on thin film pressure control and coating structure using same
BYUN A-SEOP, KOO KYUNG-SEUNG, YOU YO-HAN, WANG HONGLAI, BYUN JAE-HO, SUN YINGJUN, LEE IN-HAENG, LEE YONG-SU, HAN JIN-WOO
Year of Publication 24.01.2023
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Year of Publication 24.01.2023
Patent