Search Results - "BUURMAN ERIK" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

EUV RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

EUV RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

by MESTROM WILBERT, SWINKELS GERARDUS, BUURMAN ERIK, LOOPSTRA ERIK
Year of Publication 12.10.2012

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Patent

EUV RADIATION SOURCE COMPRISING A DROPLET ACCELARATOR AND LITHOGRAPHY APPARATUS

EUV RADIATION SOURCE COMPRISING A DROPLET ACCELARATOR AND LITHOGRAPHY APPARATUS

by MESTROM WILBERT, SWINKELS GERARDUS, BUURMAN ERIK, LOOPSTRA ERIK
Year of Publication 11.10.2012

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Patent

RADIATION SOURCE, METHOD OF CONTROLLING A RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A DEVICE

RADIATION SOURCE, METHOD OF CONTROLLING A RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A DEVICE

by BUURMAN ERIK, CSISZAR SZILARD
Year of Publication 24.01.2013

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Patent

Radiation source, method of controlling a radiation source, lithographic apparatus, and method for manufacturing a device

Radiation source, method of controlling a radiation source, lithographic apparatus, and method for manufacturing a device

by CSISZAR SZILARD ISTVAN, BUURMAN ERIK PETRUS
Year of Publication 04.03.2014

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Patent

EUV radiation source comprising a droplet accelerator and lithographic apparatus

EUV radiation source comprising a droplet accelerator and lithographic apparatus

by MESTROM WILBERT, SWINKELS GERARDUS, BUURMAN ERIK, LOOPSTRA ERIK
Year of Publication 08.07.2015

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Patent

RADIATION SOURCE, METHOD OF CONTROLLING A RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A DEVICE

RADIATION SOURCE, METHOD OF CONTROLLING A RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A DEVICE

by CSISZAR SZILARD ISTVAN, BUURMAN ERIK PETRUS
Year of Publication 24.01.2013

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Patent

LASER RADIATION SYSTEM, PLASMA RADIATION SYSTEM FOR LITHOGRAPHIC APPARATUS AND ASSOCIATED METHODS

LASER RADIATION SYSTEM, PLASMA RADIATION SYSTEM FOR LITHOGRAPHIC APPARATUS AND ASSOCIATED METHODS

by KLEEMANS NIEK, SYTINA OLGA, BUURMAN ERIK, HOFSTRA RAMON
Year of Publication 15.12.2014

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Patent

Radiation source

Radiation source

by Bleeker, Arno Jan, Moors, Johannes Hubertus Josephina, Voorma, Harm-Jan, Muys, Peter Frans Maria, Eurlings, Markus Franciscus Antonius, Hofstra, Ramon Mark, Oemrawsingh, Sumant Sukdew Ramanujan, Buurman, Erik Petrus, Struycken, Alexander Matthijs
Year of Publication 05.03.2019

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Patent

Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method

Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method

by LOOPSTRA ERIK ROELOF, SWINKELS GERARDUS HUBERTUS PETRUS MARIA, STAMM UWE BRUNO HEINI, BUURMAN ERIK PETRUS
Year of Publication 18.08.2015

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Patent

Lithographic apparatus, source, source controller and control method

Lithographic apparatus, source, source controller and control method

by TRENTELMAN MARK, HEINTZE JOHANNES, BUURMAN ERIK PETRUS
Year of Publication 11.01.2011

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Patent

Lithographic apparatus, source, source controller and control method

Lithographic apparatus, source, source controller and control method

by Heintze, Johannes, Buurman, Erik Petrus, Trentelman, Mark
Year of Publication 11.01.2011

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Patent

RADIATION SOURCE, METHOD OF CONTROLLING A RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A DEVICE

RADIATION SOURCE, METHOD OF CONTROLLING A RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A DEVICE

by BUURMAN, ERIK, ASTEN, NICOLAAS, KREUWEL, HERMANUS
Year of Publication 06.01.2011

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Patent

Lithographic apparatus, excimer laser and device manufacturing method

Lithographic apparatus, excimer laser and device manufacturing method

by DE KRUIF ROBERTUS CORNELIS MARTINUS, BRULS RICHARD JOSEPH, TEEUWSEN JOHANNES WILHELMUS MARIA CORNELIS, BUURMAN ERIK PETRUS
Year of Publication 19.04.2016

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Patent

LASER DEVICE

LASER DEVICE

by BUURMAN, ERIK, LOOPSTRA, ERIK, SWINKELS, GERARDUS
Year of Publication 13.07.2010

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Patent

Radiation Source

Radiation Source

by BUURMAN Erik Petrus, EURLINGS Markus Franciscus Antonius, BLEEKER Arno Jan, STRUYCKEN Alexander Matthijs, VOORMA Harm-Jan, MOORS Johannes Hubertus Josephina, OEMRAWSINGH Sumant Sukdew Ramanujan, HOFSTRA Ramon Mark, MUYS Peter Frans Maria
Year of Publication 01.02.2018

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LITHOGRAPHIC APPARATUS, EUV RADIATION GENERATION APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS, EUV RADIATION GENERATION APPARATUS AND DEVICE MANUFACTURING METHOD

by BUURMAN, ERIK, LOOPSTRA, ERIK, STAMM, UWE, SWINKELS, GERARDUS
Year of Publication 15.03.2012

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Patent

EUV radiation source comprising a droplet accelerator and lithographic apparatus

EUV radiation source comprising a droplet accelerator and lithographic apparatus

by LOOPSTRA ERIK ROELOF, SWINKELS GERARDUS HUBERTUS PETRUS MARIA, BUURMAN ERIK PETRUS, MESTROM WILBERT JAN
Year of Publication 03.12.2013

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Patent

EUV RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

EUV RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

by BUURMAN, ERIK, LOOPSTRA, ERIK, SWINKELS, GERARDUS, MESTROM, WILBERT
Year of Publication 14.07.2011

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Patent

EUV RADIATION SOURCE COMPRISING A DROPLET ACCELERATOR AND LITHOGRAPHIC APPARATUS

EUV RADIATION SOURCE COMPRISING A DROPLET ACCELERATOR AND LITHOGRAPHIC APPARATUS

by BUURMAN, ERIK, LOOPSTRA, ERIK, SWINKELS, GERARDUS, MESTROM, WILBERT
Year of Publication 14.07.2011

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Patent

Increasing pulse-to-pulse radiation beam uniformity

Increasing pulse-to-pulse radiation beam uniformity

by Noordman, Oscar Franciscus Jozephus, Buurman, Erik Petrus
Year of Publication 18.11.2008

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Patent