Fabrication and investigation of three-dimensional ferroelectric capacitors for the application of FeRAM
Yeh, Chia-Pin, Lisker, Marco, Kalkofen, Bodo, Burte, Edmund P.
Published in AIP advances (01.03.2016)
Published in AIP advances (01.03.2016)
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A 3D-CMOS compatible silicon photo-sensor with a large vertical photosensitive area
Sabri Alirezaei, Iman, Vierhaus, Jörg, Burte, Edmund P.
Published in Optical and quantum electronics (01.03.2017)
Published in Optical and quantum electronics (01.03.2017)
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Journal Article
Enhanced ferroelectric properties of multilayer SBT-BTN thin films for NVRAM applications
Khorkhordin, O., Yeh, C. P., Kalkofen, B., Burte, E. P.
Published in Integrated ferroelectrics (21.11.2016)
Published in Integrated ferroelectrics (21.11.2016)
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Journal Article
High temperature reactive ion etching of iridium thin films with aluminum mask in CF4/O2/Ar plasma
Yeh, Chia-Pin, Lisker, Marco, Kalkofen, Bodo, Burte, Edmund P.
Published in AIP advances (01.08.2016)
Published in AIP advances (01.08.2016)
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Journal Article
The role of hydrogen in hot wire chemical vapor deposition of Ge-Sb-Te thin films
Reso, D., Silinskas, M., Lisker, M., Gewalt, A., Burte, E.P.
Published in Thin solid films (31.01.2011)
Published in Thin solid films (31.01.2011)
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Miniaturized band-stop filter based on multilayer-technique and new coupled octagonal defected ground structure with interdigital capacitor
Boutejdar, A., Abdel-Rahman, A., Batmanov, A., Burte, P., Omar, A.
Published in Microwave and optical technology letters (01.03.2010)
Published in Microwave and optical technology letters (01.03.2010)
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Journal Article
Iridium Thin Films Deposited by Liquid Delivery MOCVD using Ir(EtCp)(1,5-COD) with Toluene Solvent
Ritterhaus, Y., Hur'yeva, T., Lisker, M., Burte, E. P.
Published in Chemical vapor deposition (01.12.2007)
Published in Chemical vapor deposition (01.12.2007)
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Journal Article
Synthesis and Crystal Structures of the First Antimony(III) Aziridinides
Harmgarth, Nicole, Liebing, Phil, Zörner, Florian, Silinskas, Mindaugas, Burte, Edmund P, Edelmann, Frank T
Published in Inorganic chemistry (17.04.2017)
Published in Inorganic chemistry (17.04.2017)
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Journal Article
An improvement of defected ground structure lowpass/bandpass filters using H-slot resonators and coupling matrix method
Boutejdar, Ahmed, Omar, Abbas, Burte, Edmund P., Mikuta, Reinhard
Published in Journal of Microwaves, Optoelectronics and Electromagnetic Applications (01.12.2011)
Published in Journal of Microwaves, Optoelectronics and Electromagnetic Applications (01.12.2011)
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Journal Article
Molecular Precursors for the Phase‐Change Material Germanium‐Antimony‐Telluride, Ge2Sb2Te5 (GST)
Harmgarth, Nicole, Zörner, Florian, Liebing, Phil, Burte, Edmund P., Silinskas, Mindaugas, Engelhardt, Felix, Edelmann, Frank T.
Published in Zeitschrift für anorganische und allgemeine Chemie (1950) (04.10.2017)
Published in Zeitschrift für anorganische und allgemeine Chemie (1950) (04.10.2017)
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Application of atomic layer deposited dopant sources for ultra-shallow doping of silicon
Kalkofen, Bodo, Amusan, Akinwumi A., Lisker, Marco, Burte, Edmund P.
Published in Physica status solidi. C (01.01.2014)
Published in Physica status solidi. C (01.01.2014)
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A simple two-step phosphorus doping process for shallow junctions by applying a controlled adsorption and a diffusion in an oxidising ambient
Kalkofen, Bodo, Lisker, Marco, Burte, Edmund P.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (15.12.2004)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (15.12.2004)
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