ROTARY REACTOR FOR DEPOSITION OF FILMS ONTO PARTICLES
Desai, Govindraj, Sivaramakrishnan, Visweswaren, Frankel, Jonathan, Krishnasamy, Sekar, Ishikawa, David Masayuki, Pattanshetty, Basavaraj, Cambron, Mario, Raju, Hemantha Kumar, Raravi, Ayyanagouda, Swaminathan, Shrikant, Wang, Miaojun, Burrows, Brian Hayes, Mudalkar, Monika, Navasca, Robert
Year of Publication 27.04.2023
Get full text
Year of Publication 27.04.2023
Patent
EPITAXIAL DEPOSITION CHAMBER
COLLINS, Richard O, NAKAGAWA, Toshiyuki, MORADIAN, Ala, NELLIKKA, Shainish, CHOO, Enle, DUBE, Abhishek, BURROWS, Brian Hayes, LAU, Shu-Kwan, WANG, Danny D, YE, Zhiyuan, SHAH, Kartik Bhupendra
Year of Publication 13.10.2022
Get full text
Year of Publication 13.10.2022
Patent
EPITAXIAL DEPOSITION CHAMBER
COLLINS, Richard O, NAKAGAWA, Toshiyuki, MORADIAN, Ala, NELLIKKA, Shainish, CHOO, Enle, DUBE, Abhishek, BURROWS, Brian Hayes, LAU, Shu-Kwan, WANG, Danny D, YE, Zhiyuan, SHAH, Kartik Bhupendra
Year of Publication 06.10.2022
Get full text
Year of Publication 06.10.2022
Patent
WAFER EDGE TEMPERATURE CORRECTION IN BATCH THERMAL PROCESS CHAMBER
CHU, Schubert S, MORADIAN, Ala, PANDEY, Vishwas Kumar, KUMAR, Surajit, BURROWS, Brian Hayes, LAU, Shu-Kwan, TANNOUS, Adel George, RANGAPPA, Srinivasa, SHAH, Kartik Bhupendra, MYO, Nyi O, ZHU, Zuoming
Year of Publication 10.02.2022
Get full text
Year of Publication 10.02.2022
Patent
Rotary reactor for depositing film onto particles
LARAVI, AYANAGOUDA, FRANKEL JONATHAN, WANG MIAOJUN, KRISHNASAMY SEKHAR, DESAI, GOVINDRA, RAJU HIMANTHA KUMAR, PATTANSHETTY, BASAVARAJ, SIVARAMAKRISHNAN, VISWESWARAN, ISHIKAWA DAVID MASAYUKI, CAMBRANCO MARIO, SWAMINATHAN, SHRIKANT, NAWASKA, ROBERT, BURROWS, BRIAN HAYES, MUDALKA MONIKA
Year of Publication 28.05.2024
Get full text
Year of Publication 28.05.2024
Patent
INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CONTROL AND GAS REACTION KINETICS IN LOW TEMPERATURE CVD SYSTEMS
CARLSON David Keith, BURROWS Brian Hayes, DINIZ Herman, KUPPURAO Satheesh, SANCHEZ Errol Antonio, PATALAY Kailash Kiran, LI Xiaowei, CAMPBELL Jeffery Ronald, ZHU Zuoming, BECKFORD Howard
Year of Publication 21.12.2017
Get full text
Year of Publication 21.12.2017
Patent
Rotary reactor for deposition of films onto particles
NAVASCA, ROBERT, FRANKEL, JONATHAN, SIVARAMAKRISHNAN, VISWESWAREN, WANG, MIAOJUN, PATTANSHETTY, BASAVARAJ, KRISHNASAMY, SEKAR, ISHIKAWA, DAVID MASAYUKI, MUDALKAR, MONIKA, RARAVI, AYYANAGOUDA, RAJU, HEMANTHA KUMAR, SWAMINATHAN, SHRIKANT, CAMBRON, MARIO, BURROWS, BRIAN HAYES, DESAI, GOVINDRAJ
Year of Publication 01.09.2023
Get full text
Year of Publication 01.09.2023
Patent
Epitaxial deposition chamber
YE ZHIYUAN, DUBEY, ABUSHEK, MORADIA ALLA, ZHU ENLE, WONG, DANNY, D, LAU SHU-KWAN, XIAN, KARTIK, BHUPENDRA, COLLINS RICHARD O, BURROWS, BRIAN HAYES, NAKAGAWA TOSHIYUKI, NELIKAR, SANEESH
Year of Publication 01.08.2023
Get full text
Year of Publication 01.08.2023
Patent
Wafer edge temperature correction in batch thermal processing chamber
PANDEY VISHWAS KUMAR, CHU SCHUBERT S, MORADIA ALLA, ZHU ZUOMING, RANGAPPA, SRINIVASA, MYO NYI O, LAU SHU-KWAN, XIAN, KARTIK, BHUPENDRA, TANO ADEL GEORGES, KUMAR SURAJIT, BURROWS, BRIAN HAYES
Year of Publication 16.12.2022
Get full text
Year of Publication 16.12.2022
Patent
Epitaxial deposition chamber
NAKAGAWA, TOSHIYUKI, CHOO, ENLE, SHAH, KARTIK BHUPENDRA, LAU, SHU-KWAN, WANG, DANNY D, YE, ZHIYUAN, MORADIAN, ALA, COLLINS, RICHARD O, DUBE, ABHISHEK, BURROWS, BRIAN HAYES, NELLIKKA, SHAINISH
Year of Publication 16.11.2022
Get full text
Year of Publication 16.11.2022
Patent