SEMICONDUCTOR PROCESSING SYSTEMS WITH IN-SITU ELECTRICAL BIAS
VAN DER LINDE GERHARDUS, CLARKE BARRY, COLGAN IAN, HUGHES PATRICK, LEUSINK GERRIT J, POPOVICI MIHAELA LOANA, CLARK ROBERT, TRIYOSO DINA, BUREL MACIEJ, HURLEY DAVID, DOMSA IOAN, RAGNARSSON LARS AKE
Year of Publication 01.09.2022
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Year of Publication 01.09.2022
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Semiconductor processing systems with in-situ electrical bias
Domsa, Ioan, Van Der Linde, Gerhardus, Clarke, Barry, Burel, Maciej, Ragnarsson, Lars-Ake, Clark, Robert, Leusink, Gerrit J, Hurley, David, Popovici, Mihaela Ioana, Triyoso, Dina, Colgan, Ian, Hughes, Patrick
Year of Publication 06.02.2024
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Year of Publication 06.02.2024
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SEMICONDUCTOR PROCESSING SYSTEMS WITH IN-SITU ELECTRICAL BIAS
Domsa, Ioan, Van Der Linde, Gerhardus, Clarke, Barry, Burel, Maciej, Ragnarsson, Lars-Ake, Clark, Robert, Leusink, Gerrit J, Hurley, David, Popovici, Mihaela Ioana, Triyoso, Dina, Colgan, Ian, Hughes, Patrick
Year of Publication 07.10.2021
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Year of Publication 07.10.2021
Patent
Semiconductor processing systems with in-situ electrical bias
RAGNARSSON, LARS-AKE, HUGHES, PATRICK, COLGAN, IAN, CLARKE, BARRY, POPOVICI, MIHAELA IOANA, DOMSA, IOAN, VAN DER LINDE, GERHARDUS, BUREL, MACIEJ, TRIYOSO, DINA, HURLEY, DAVID, LEUSINK, GERRIT J, CLARK, ROBERT
Year of Publication 11.11.2023
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Year of Publication 11.11.2023
Patent
Semiconductor processing systems with in-situ electrical bias
RAGNARSSON, LARS-AKE, HUGHES, PATRICK, COLGAN, IAN, CLARKE, BARRY, POPOVICI, MIHAELA IOANA, DOMSA, IOAN, VAN DER LINDE, GERHARDUS, BUREL, MACIEJ, TRIYOSO, DINA, HURLEY, DAVID, LEUSINK, GERRIT J, CLARK, ROBERT
Year of Publication 01.11.2022
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Year of Publication 01.11.2022
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