레티클 클램핑 디바이스
NAYFEH SAMIR A, EVANS BRANDON ADAM, ZORDAN ENRICO, BAHETI ANKUR RAMESH, BURBANK DANIEL NATHAN
Year of Publication 14.10.2019
Get full text
Year of Publication 14.10.2019
Patent
GAS FLOW OPTIMIZATION IN RETICLE STAGE ENVIRONMENT
SINGH CHATTARBIR, WESTERLAKEN JAN STEVEN CHRISTIAAN, VAN DE VEN HENRICUS ANITA JOZEF WILHEMUS, WARD CHRISTOPHER CHARLES, VAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS, FONSECA JUNIOR JOSE NILTON, LOOPSTRA ERIK ROELOF, CUYPERS KOEN, VAN BOXTEL FRANK JOHANNES JACOBUS, SCHUSTER MARK JOSEF, VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS, REMIE MARINUS JAN, DE ANDRADE OLIVEIRA MARCELO HENRIQUE, ONVLEE JOHANNES, BURBANK DANIEL NATHAN
Year of Publication 27.10.2015
Get full text
Year of Publication 27.10.2015
Patent
A MEMBRANE ASSEMBLY AND PARTICLE TRAP
BURBANK, Daniel, Nathan, BAKER, Lowell, Lane, ALBRIGHT, Ronald, Peter
Year of Publication 01.02.2018
Get full text
Year of Publication 01.02.2018
Patent
RETICLE CLAMPING DEVICE
DANIEL NATHAN BURBANK, ANKUR RAMESH BAHETI, BRANDON ADAM EVANS, SAMIR A. NAYFEH, ENRICO ZORDAN
Year of Publication 22.08.2018
Get full text
Year of Publication 22.08.2018
Patent
Reticle Cooling by Non-Uniform Gas Flow
DELPUERTO Santiago E, WARD Christopher Charles, VOGEL Herman, SCHULTZ Geoffrey Alan, BURBANK Daniel Nathan, VAN BOKHOVEN Laurentius Johannes Adrianus, ONVLEE Johannes, VENTURINO Thomas, GALBURT Daniel Nicholas
Year of Publication 21.12.2017
Get full text
Year of Publication 21.12.2017
Patent
Patterning device support and lithographic apparatus
Harris Duncan, Van Damme Jean-Philippe Xavier, Sinharoy Arindam, Burbank Daniel Nathan, Schuster Mark Josef, Ward Christopher Charles, Roux Stephen S
Year of Publication 22.08.2017
Get full text
Year of Publication 22.08.2017
Patent