Method for the deposition of pure semiconductor material
BUGL; ERWIN, HAMSTER; HELMUT, KOEPPL; FRANZ, LORENZ; HELMUT, GRIESSHAMMER; RUDOLF
Year of Publication 19.01.1982
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Year of Publication 19.01.1982
Patent
DE2912661
LORENZ, HELMUT, KOEPPL, FRANZ., 8262 ALTOETTING, DE, HAMSTER, HELMUT, 8263 BURGHAUSEN, DE, GRIESSHAMMER. DR, BUGL, ERWIN, ST. RADEGUND, AT
Year of Publication 24.06.1982
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Year of Publication 24.06.1982
Patent