PARALLEL PLATE REACTOR FOR UNIFORM THIN FILM DEPOSITION WITH REDUCED TOOL FOOT-PRINT
STRAHM BENJAMIN, MAI JOACHIM, WAHLI GUILLAUME, BUECHEL ARTHUR, SCHULZE THOMAS
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Year of Publication 03.01.2013
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PARALLEL PLATE REACTOR FOR UNIFORM THIN FILM DEPOSITION WITH REDUCED TOOL FOOT-PRINT
BUECHEL, ARTHUR, WAHLI, GUILLAUME, MAI, JOACHIM, SCHULZE, THOMAS, STRAHM, BENJAMIN
Year of Publication 15.12.2017
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Year of Publication 15.12.2017
Patent