FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
TEUNISSEN MARCEL MARIA CORNELIUS FRANCISCUS, VAN VLIET EVERT, KEUKENS FLOOR LODEWIJK, TEN KATE NICOLAAS, ROPS CORNELIUS MARIA, CUYPERS KOEN, TANASA GHEORGHE, VAN DEN EIJNDEN PEPIJN, VAN ERVE JANTIEN LAURA, FRENCKEN MARK JOHANNES HERMANUS, GATTOBIGIO GIOVANNI LUCA, POLET THEODORUS WILHELMUS, BUDDENBERG HAROLD SEBASTIAAN, CORTIE ROGIER HENDRIKUS MAGDALENA
Year of Publication 26.01.2021
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Year of Publication 26.01.2021
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리소그래피 장치를 위한 유체 처리 구조물
TEUNISSEN MARCEL MARIA CORNELIUS FRANCISCUS, VAN VLIET EVERT, KEUKENS FLOOR LODEWIJK, TEN KATE NICOLAAS, ROPS CORNELIUS MARIA, CUYPERS KOEN, TANASA GHEORGHE, VAN DEN EIJNDEN PEPIJN, VAN ERVE JANTIEN LAURA, FRENCKEN MARK JOHANNES HERMANUS, GATTOBIGIO GIOVANNI LUCA, POLET THEODORUS WILHELMUS, BUDDENBERG HAROLD SEBASTIAAN, CORTIE ROGIER HENDRIKUS MAGDALENA
Year of Publication 24.04.2019
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Year of Publication 24.04.2019
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Fluid handling structure for lithographic apparatus
Tanasa, Gheorghe, Rops, Cornelius Maria, Cuypers, Koen, Keukens, Floor Lodewijk, Frencken, Mark Johannes Hermanus, Gattobigio, Giovanni Luca, Cortie, Rogier Hendrikus Magdalena, Ten Kate, Nicolaas, Van Vliet, Evert, Teunissen, Marcel Maria Cornelius Franciscus, Buddenberg, Harold Sebastiaan, Polet, Theodorus Wilhelmus, Van Erve, Jantien Laura, Van Den Eijnden, Pepijn
Year of Publication 02.01.2024
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Year of Publication 02.01.2024
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FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
CORTIE, Rogier Hendrikus Magdalena, POLET, Theodorus Wilhelmus, TEUNISSEN, Marcel Maria Cornelius Franciscus, TEN KATE, Nicolaas, CUYPERS, Koen, KEUKENS, Floor Lodewijk, FRENCKEN, Mark Johannes Hermanus, BUDDENBERG, Harold Sebastiaan, TANASA, Gheorghe, VAN DEN EIJNDEN, Pepijn, GATTOBIGIO, Giovanni Luca, VAN ERVE, Jantien Laura, VAN VLIET, Evert, ROPS, Cornelius Maria
Year of Publication 23.02.2023
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Year of Publication 23.02.2023
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FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
CORTIE, Rogier Hendrikus Magdalena, POLET, Theodorus Wilhelmus, TEUNISSEN, Marcel Maria Cornelius Franciscus, TEN KATE, Nicolaas, CUYPERS, Koen, KEUKENS, Floor Lodewijk, FRENCKEN, Mark Johannes Hermanus, BUDDENBERG, Harold Sebastiaan, TANASA, Gheorghe, VAN DEN EIJNDEN, Pepijn, GATTOBIGIO, Giovanni Luca, VAN ERVE, Jantien Laura, VAN VLIET, Evert, ROPS, Cornelius Maria
Year of Publication 05.10.2022
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Year of Publication 05.10.2022
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Fluid handling structure for lithographic apparatus
Tanasa, Gheorghe, Rops, Cornelius Maria, Cuypers, Koen, Keukens, Floor Lodewijk, Frencken, Mark Johannes Hermanus, Gattobigio, Giovanni Luca, Cortie, Rogier Hendrikus Magdalena, Ten Kate, Nicolaas, Van Vliet, Evert, Teunissen, Marcel Maria Cornelius Franciscus, Buddenberg, Harold Sebastiaan, Polet, Theodorus Wilhelmus, Van Erve, Jantien Laura, Van Den Eijnden, Pepijn
Year of Publication 27.09.2022
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Year of Publication 27.09.2022
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FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
CORTIE, Rogier Hendrikus Magdalena, POLET, Theodorus Wilhelmus, TEUNISSEN, Marcel Maria Cornelius Franciscus, TEN KATE, Nicolaas, CUYPERS, Koen, KEUKENS, Floor Lodewijk, FRENCKEN, Mark Johannes Hermanus, BUDDENBERG, Harold Sebastiaan, TANASA, Gheorghe, VAN DEN EIJNDEN, Pepijn, GATTOBIGIO, Giovanni Luca, VAN ERVE, Jantien Laura, VAN VLIET, Evert, ROPS, Cornelius Maria
Year of Publication 26.08.2021
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Year of Publication 26.08.2021
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Fluid handling structure for lithographic apparatus
Tanasa, Gheorghe, Rops, Cornelius Maria, Cuypers, Koen, Keukens, Floor Lodewijk, Frencken, Mark Johannes Hermanus, Gattobigio, Giovanni Luca, Cortie, Rogier Hendrikus Magdalena, Ten Kate, Nicolaas, Van Vliet, Evert, Teunissen, Marcel Maria Cornelius Franciscus, Buddenberg, Harold Sebastiaan, Polet, Theodorus Wilhelmus, Van Erve, Jantien Laura, Van Den Eijnden, Pepijn
Year of Publication 08.06.2021
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Year of Publication 08.06.2021
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FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
POLET, Theodorus Wilhelmus, TEN KATE, Nicolaas, CUYPERS, Koen, TEUNISSEN, Marcel Maria Cornelius Franciscu, KEUKENS, Floor Lodewijk, FRENCKEN, Mark Johannes Hermanus, BUDDENBERG, Harold Sebastiaan, TANASA, Gheorghe, VAN DEN EIJNDEN, Pepijn, CORTIE, Rogier Hendrikus Magdalen, GATTOBIGIO, Giovanni Luca, VAN ERVE, Jantien Laura, VAN VLIET, Evert, ROPS, Cornelius Maria
Year of Publication 31.12.2020
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Year of Publication 31.12.2020
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INSPECTION SUBSTRATE AND INSPECTION METHOD
EUMMELEN, Erik, Henricus, Egidius,Catharina, KEUKENS, , Floor, Lodewijk, YU, Miao, BUDDENBERG, Harold, Sebastiaan, MIGCHELBRINK, Ferdy, RAAYMAKERS, Jeroen, Arnoldus, Leonardus, Johannes, TANASA, Gheorghe, WOUTERS, Marijn, ARTS, Petrus, Martinus, Gerardus, Johannes, VAN SOMMEREN, Daan, Daniel, Johannes,Antonius, VAN DE WINKEL, Jimmy, Matheus,Wilhelmus, GATTOBIGIO, Giovanni, Luca, RAS, Arnoldus, Johannes, Martinus, Jozeph, SAEED, Seerwan
Year of Publication 02.09.2020
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Year of Publication 02.09.2020
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Inspection substrate and an inspection method
Wouters, Marijn, Eummelen, Erik Henricus Egidius Catharina, Migchelbrink, Ferdy, Tanasa, Gheorghe, Keukens, Floor Lodewijk, Yu, Miao, Van Sommeren, Daan Daniel Johannes Antonius, Ras, Arnoldus Johannes Martinus Jozeph, Gattobigio, Giovanni Luca, Raaymakers, Jeroen Arnoldus Leonardus Johannes, Van De Winkel, Jimmy Matheus Wilhelmus, Arts, Petrus Martinus Gerardus Johannes, Buddenberg, Harold Sebastiaan, Saeed, Seerwan
Year of Publication 28.07.2020
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Year of Publication 28.07.2020
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Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus
Nakiboglu, Günes, Buddenberg, Harold Sebastiaan, Melman, Johannes Cornelius Paulus, Vieyra Salas, Jorge Alberto, Zdravkov, Aleksandar Nikolov, Polet, Theodorus Wilhelmus, Stals, Walter Theodorus Matheus, Van Sommeren, Daan Daniel Johannes Antonius, Gattobigio, Giovanni Luca, Van Lieshout, Josephus Peter, Baltis, Coen Hubertus Matheus, Van De Vijver, Yuri Johannes Gabriël
Year of Publication 25.02.2020
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Year of Publication 25.02.2020
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SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A LITHOGRAPHIC APPARATUS
ZDRAVKOV, Aleksandar Nikolov, BALTIS, Coen Hubertus Matheus, POLET, Theodorus Wilhelmus, VAN SOMMEREN, Daan Daniel Johannes Antonius, GATTOBIGIO, Giovanni Luca, VIEYRA SALAS, Jorge Alberto, MELMAN, Johannes Cornelis Paulus, VAN LIESHOUT, Josephus Peter, STALS, Walter Theodorus Matheus, VAN DE VIJVER, Yuri Johannes Gabriël, BUDDENBERG, Harold Sebastiaan, NAKIBOGLU, Günes
Year of Publication 01.01.2020
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Year of Publication 01.01.2020
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SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING A LITHOGRAPHIC APPARATUS
ZDRAVKOV, Aleksandar Nikolov, BALTIS, Coen Hubertus Matheus, POLET, Theodorus Wilhelmus, VAN SOMMEREN, Daan Daniel Johannes Antonius, GATTOBIGIO, Giovanni Luca, VIEYRA SALAS, Jorge Alberto, MELMAN, Johannes Cornelis Paulus, VAN LIESHOUT, Josephus Peter, STALS, Walter Theodorus Matheus, VAN DE VIJVER, Yuri Johannes Gabriël, BUDDENBERG, Harold Sebastiaan, NAKIBOGLU, Günes
Year of Publication 29.08.2019
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Year of Publication 29.08.2019
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FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
CORTIE, Rogier Hendrikus Magdalena, POLET, Theodorus Wilhelmus, TEUNISSEN, Marcel Maria Cornelius Franciscus, TEN KATE, Nicolaas, CUYPERS, Koen, KEUKENS, Floor Lodewijk, FRENCKEN, Mark Johannes Hermanus, BUDDENBERG, Harold Sebastiaan, TANASA, Gheorghe, VAN DEN EIJNDEN, Pepijn, GATTOBIGIO, Giovanni Luca, VAN ERVE, Jantien Laura, VAN VLIET, Evert, ROPS, Cornelius Maria
Year of Publication 17.07.2019
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Year of Publication 17.07.2019
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Substrate table, lithographic apparatus and method of operating a lithographic apparatus
Melman, Johannes Cornelis Paulus, Nakiboglu, Günes, Buddenberg, Harold Sebastiaan, Vieyra Salas, Jorge Alberto, Zdravkov, Aleksandar Nikolov, Polet, Theodorus Wilhelmus, Stals, Walter Theodorus Matheus, Van Sommeren, Daan Daniel Johannes Antonius, Gattobigio, Giovanni Luca, Van Lieshout, Josephus Peter, Baltis, Coen Hubertus Matheus, Van De Vijver, Yuri Johannes Gabriël
Year of Publication 11.06.2019
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Year of Publication 11.06.2019
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Inspection Substrate and an Inspection Method
Wouters, Marijn, Eummelen, Erik Henricus Egidius Catharina, Migchelbrink, Ferdy, Tanasa, Gheorghe, Keukens, Floor Lodewijk, Yu, Miao, Van Sommeren, Daan Daniel Johannes Antonius, Ras, Arnoldus Johannes Martinus Jozeph, Gattobigio, Giovanni Luca, Van De Winkel, Jimmy Matheus Wilhelmus, Arts, Petrus Martinus Gerardus Johannes, Buddenberg, Harold Sebastiaan, Johannes Raaymakers, Jeroen Arnoldus Leonardus, Saeed, Seerwan
Year of Publication 16.05.2019
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Year of Publication 16.05.2019
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Inspection substrate and an inspection method
Wouters, Marijn, Eummelen, Erik Henricus Egidius Catharina, Migchelbrink, Ferdy, Tanasa, Gheorghe, Keukens, Floor Lodewijk, Yu, Miao, Van Sommeren, Daan Daniel Johannes Antonius, Ras, Arnoldus Johannes Martinus Jozeph, Gattobigio, Giovanni Luca, Raaymakers, Jeroen Arnoldus Leonardus Johannes, Van De Winkel, Jimmy Matheus Wilhelmus, Arts, Petrus Martinus Gerardus Johannes, Buddenberg, Harold Sebastiaan, Saeed, Seerwan
Year of Publication 26.02.2019
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Year of Publication 26.02.2019
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SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A LITHOGRAPHIC APPARATUS
ZDRAVKOV, Aleksandar Nikolov, BALTIS, Coen Hubertus Matheus, POLET, Theodorus Wilhelmus, VIEYRA SALAS, Jorge Alverto, VAN SOMMEREN, Daan Daniel Johannes Antonius, GATTOBIGIO, Giovanni Luca, MELMAN, Johannes Cornelis Paulus, VAN LIESHOUT, Josephus Peter, STALS, Walter Theodorus Matheus, VAN DE VIJVER, Yuri Johannes Gabriël, BUDDENBERG, Harold Sebastiaan, NAKIBOGLU, Günes
Year of Publication 20.12.2018
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Year of Publication 20.12.2018
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SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A LITHOGRAPHIC APPARATUS
ZDRAVKOV, Aleksandar Nikolov, BALTIS, Coen Hubertus Matheus, POLET, Theodorus Wilhelmus, VAN SOMMEREN, Daan Daniel Johannes Antonius, GATTOBIGIO, Giovanni Luca, VIEYRA SALAS, Jorge Alberto, MELMAN, Johannes Cornelis Paulus, VAN LIESHOUT, Josephus Peter, STALS, Walter Theodorus Matheus, VAN DE VIJVER, Yuri Johannes Gabriël, BUDDENBERG, Harold Sebastiaan, NAKIBOGLU, Günes
Year of Publication 17.10.2018
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Year of Publication 17.10.2018
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