Search Results - "BUDACH, MICHAEL" :: K.UTB vyhledávací portál

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포토마스크에 대한 작업을 교정하기 위한 방법 및 장치

by BUDACH MICHAEL
Year of Publication 09.07.2024

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리소그라픽 오브젝트를 처리하기 위한 방법 및 장치

by BUDACH MICHAEL
Year of Publication 27.06.2024

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METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROLITHOGRAPHIC PHOTOMASK

by HOFMANN THORSTEN, BUDACH MICHAEL
Year of Publication 17.03.2023

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APPARATUS AND METHOD FOR REPAIRING A PHOTOLITHOGRAPHIC MASK

by BUDACH MICHAEL, HOINKIS OTTMAR
Year of Publication 11.07.2022

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APPARATUS AND METHOD FOR DETERMINING A POSITION OF AN ELEMENT ON A PHOTOLITHOGRAPHIC MASK

by BUDACH MICHAEL, AUTH NICOLE
Year of Publication 31.03.2022

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샘플을 검사 및/또는 처리하기 위한 장치 및 방법

by BUDACH MICHAEL, BAUR CHRISTOF
Year of Publication 25.02.2021

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APPARATUS AND METHOD FOR REPAIRING A PHOTOLITHOGRAPHIC MASK

by BUDACH MICHAEL, HOINKIS OTTMAR
Year of Publication 14.08.2020

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APPARATUS AND METHOD FOR DETERMINING A POSITION OF AN ELEMENT ON A PHOTOLITHOGRAPHIC MASK

by BUDACH MICHAEL, AUTH NICOLE
Year of Publication 30.07.2020

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포토리소그라픽 마스크의 결함 개소를 분석하기 위한 방법 및 장치

by SCHONBERGER RALF, BUDACH MICHAEL
Year of Publication 23.10.2019

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MESH INTEGRITY CHECK

by GUENTNER JAN, SCHOTSCH FRANS FELIX, LAEMMLE DAVID, BUDACH MICHAEL
Year of Publication 21.03.2024

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마이크로리소그라픽 포토마스크의 결함의 입자 빔-유도 처리 방법 및 장치

by BRENDEL MICHAEL, REUSS MARTIN GUENTER, RENSING CHRISTIAN, BUDACH MICHAEL
Year of Publication 26.01.2024

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입자 빔으로 샘플을 분석 및/또는 처리하는 장치 및 방법

by HOFMANN THORSTEN, BUDACH MICHAEL, AUTH NICOLE, OSTER JENS
Year of Publication 03.05.2023

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METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOLITHOGRAPHIC MASK

by BRET TRISTAN, BUDACH MICHAEL, BAUR CHRISTOF, EDINGER KLAUS
Year of Publication 28.03.2023

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METHOD DEVICE AND COMPUTER PROGRAM FOR REPAIRING A MASK DEFECT

by BUDACH MICHAEL, BAUR CHRISTOF, OSTER JENS, SCHONEBERG JOHANNES
Year of Publication 05.10.2022

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리소그래픽 마스크에 사용되는 퇴적 재료의 광학 특성을 결정하기 위한 방법 및 장치

by TU FAN, BUDACH MICHAEL, HERMANNS CHRISTIAN FELIX, AUTH NICOLE
Year of Publication 21.03.2024

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METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOLITHOGRAPHIC MASK

by BRET TRISTAN, BUDACH MICHAEL, BAUR CHRISTOF, EDINGER KLAUS
Year of Publication 11.03.2022

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포토리소그래피용 요소를 검사 및/또는 처리하기 위한 장치 및 방법

by WOJEK CHRISTIAN, FREYTAG ALEXANDER, RENSING CHRISTIAN, BUDACH MICHAEL, AUTH NICOLE
Year of Publication 24.02.2021

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METHOD FOR DETERMINING A REPAIR SHAPE OF A DEFECT ON OR IN THE VICINITY OF AN EDGE OF A SUBSTRATE OF A PHOTOMASK

by BUDACH MICHAEL
Year of Publication 15.09.2011

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포토리소그래피 마스크의 과잉 재료의 폐기를 위한 방법 및 장치

by BRET TRISTAN, BUDACH MICHAEL, BAUR CHRISTOF, EDINGER KLAUS
Year of Publication 19.02.2020

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METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT

by Budach, Michael
Year of Publication 19.09.2024

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