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Year of Publication 27.12.2016
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Year of Publication 10.09.2019
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Year of Publication 14.03.2024
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INTEGRATED PVD TUNGSTEN LINER AND SEAMLESS CVD TUNGSTEN FILL
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Year of Publication 14.03.2024
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Year of Publication 14.03.2024
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ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
CUI, Anqing, RASHEED, Muhammad M, CHANG, Yu, WU, Dien-Yeh, BU, Kyoung-Ho, JANGRA, Vikas, YANG, Yixiong, KUANG, William W, TANG, Wei V, GUNGOR, Faruk, YUAN, Xiaoxiong, GANDIKOTA, Srinivas
Year of Publication 30.05.2019
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Year of Publication 30.05.2019
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Integrated PVD tungsten liner and seamless CVD tungsten fill
QI, ZHI-MIN, LEI, WEI, LIN, CHEN-HAN, VASQUEZ, GERALDINE, ZHAO, XIAN-YUAN, PETHE, SHIRISH, HOU, WENTING, ZHANG, AI-XI, WU, DIEN-YEH, GAO, XING-YAO, RAVI, JALLEPALLY, TANG, XIANMIN, BU, KYOUNG-HO, DU, CHAO, YANG, TSUNG-HAN, LEI, YU, XU, YI, WANG, RONG-JUN
Year of Publication 16.03.2024
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Year of Publication 16.03.2024
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ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
CUI, Anqing, RASHEED, Muhammad M, CHANG, Yu, WU, Dien-Yeh, BU, Kyoung-Ho, JANGRA, Vikas, YANG, Yixiong, KUANG, William W, TANG, Wei V, GUNGOR, Faruk, YUAN, Xiaoxiong, GANDIKOTA, Srinivas
Year of Publication 16.05.2018
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Year of Publication 16.05.2018
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ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
CUI, Anqing, RASHEED, Muhammad M, CHANG, Yu, WU, Dien-Yeh, BU, Kyoung-Ho, JANGRA, Vikas, YANG, Yixiong, KUANG, William W, TANG, Wei V, GUNGOR, Faruk, YUAN, Xiaoxiong, GANDIKOTA, Srinivas
Year of Publication 16.08.2017
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Year of Publication 16.08.2017
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METHOD FOR CLEANING TITANIUM ALLOY DEPOSITION
GANGULI SESHADRI, ZHOU JING, GANDIKOTA SRINIVAS, BU KYOUNG-HO, THOMPSON DAVID, LU XINLIANG
Year of Publication 26.03.2015
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Year of Publication 26.03.2015
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ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
JANGRA, VIKAS, RASHEED, MUHAMMAD M, CHANG, YU, CUI, ANQING, BU, KYOUNG-HO, GUNGOR, FARUK, GANDIKOTA, SRINIVAS, KUANG, WILLIAM W, TANG, WEI V, YUAN, XIAOXIONG, WU, DIEN-YEH, YANG, YIXIONG
Year of Publication 27.04.2017
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Year of Publication 27.04.2017
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ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
JANGRA, VIKAS, RASHEED, MUHAMMAD M, CHANG, YU, CUI, ANQING, BU, KYOUNG-HO, GUNGOR, FARUK, GANDIKOTA, SRINIVAS, KUANG, WILLIAM W, TANG, WEI V, YUAN, XIAOXIONG, WU, DIEN-YEH, YANG, YIXIONG
Year of Publication 14.04.2016
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Year of Publication 14.04.2016
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ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
TANG WEI V, WU DIEN-YEH, CHANG YU, KUANG WILLIAM W, JANGRA VIKAS, YANG YIXIONG, YUAN XIAOXIONG, GANDIKOTA SRINIVAS, BU KYOUNG-HO, RASHEED MUHAMMAD M, GUNGOR FARUK, CUI ANQING
Year of Publication 07.04.2016
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Year of Publication 07.04.2016
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Atomic layer deposition chamber with thermal lid
JANGRA, VIKAS, RASHEED, MUHAMMAD M, CHANG, YU, CUI, ANQING, BU, KYOUNG-HO, GUNGOR, FARUK, WU, DIEN YEH, GANDIKOTA, SRINIVAS, KUANG, WILLIAM W, TANG, WEI V, YUAN, XIAOXIONG, YANG, YIXIONG
Year of Publication 01.07.2020
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Year of Publication 01.07.2020
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ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
TANG WEI V, WU DIEN-YEH, CHANG YU, KUANG WILLIAM W, JANGRA VIKAS, YANG YIXIONG, YUAN XIAOXIONG, GANDIKOTA SRINIVAS, BU KYOUNG-HO, RASHEED MUHAMMAD M, GUNGOR FARUK, CUI ANQING
Year of Publication 01.12.2017
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Year of Publication 01.12.2017
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Atomic layer deposition chamber with thermal lid
JANGRA, VIKAS, YANG, YI-XIONG, RASHEED, MUHAMMAD M, CHANG, YU, BU, KYOUNG-HO, GUNGOR, FARUK, CUI, AN-QING, GANDIKOTA, SRINIVAS, KUANG, WILLIAM W, TANG, WEI V, YUAN, XIAOXIONG, WU, DIEN-YEH
Year of Publication 01.06.2016
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Year of Publication 01.06.2016
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ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
TANG WEI V, CHANG YU, KUANG WILLIAM W, WU DIEN YEH, JANGRA VIKAS, YANG YIXIONG, YUAN XIAOXIONG, GANDIKOTA SRINIVAS, BU KYOUNG HO, RASHEED MUHAMMAD M, GUNGOR FARUK, CUI ANQING
Year of Publication 11.07.2023
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Year of Publication 11.07.2023
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ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
TANG WEI V, CHANG YU, KUANG WILLIAM W, WU DIEN YEH, JANGRA VIKAS, YANG YIXIONG, YUAN XIAOXIONG, GANDIKOTA SRINIVAS, BU KYOUNG HO, RASHEED MUHAMMAD M, GUNGOR FARUK, CUI ANQING
Year of Publication 20.08.2020
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Year of Publication 20.08.2020
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ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
TANG WEI V, CHANG YU, KUANG WILLIAM W, WU DIEN YEH, JANGRA VIKAS, YANG YIXIONG, YUAN XIAOXIONG, GANDIKOTA SRINIVAS, BU KYOUNG HO, RASHEED MUHAMMAD M, GUNGOR FARUK, CUI ANQING
Year of Publication 16.06.2017
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Year of Publication 16.06.2017
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