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Silica-based slurry composition comprising high molecular weight polymer for dielectric chemical mechanical polishing
by
ROBELLO DOMINIC
,
KNAPTON, ERIC
,
REISS BRIAN
,
NAIK SURAMYA
,
JOHNSON BETHANY
,
LANG KLAUS
,
LU LUNG-TAI
,
BRUSNAN SARAH
Year of Publication
07.06.2024
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