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Year of Publication 20.08.2002
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Simplified fabrication methods for rim phase-shift masks
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Year of Publication 17.07.1996
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Simplified fabrication methods for rim phase-shift masks
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Year of Publication 28.06.1995
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Optical focus test pattern monitoring system and process
PECK, BARBARA BATES, SPENCE, CHRISTOPHER ALAN, BRUNNER, TIMOTHY ALLAN, HIBBS, MICHAEL STRAIGHT
Year of Publication 04.05.1994
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Year of Publication 04.05.1994
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