정전 홀더, 대상물 테이블 및 리소그래피 장치
ENGELEN JOHANNES BERNARDUS CHARLES, TEUNISSEN MARCEL MARIA CORNELIUS FRANCISCUS, HUANG ZHUANGXIONG, NAKIBOGLU GUENES, TRALLI ALDO, BRULS RICHARD JOSEPH, VAN DER MEULEN FRITS, KRUIZINGA MATTHIAS, VAN GILS PETRUS JACOBUS MARIA, GUAN TIANNAN, DE VRIES SJOERD FRANS
Year of Publication 12.04.2024
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Year of Publication 12.04.2024
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리소그래피 장치에서의 인시튜 입자 제거를 위한 장치 및 방법
PEREZ FALCON VICTOR ANTONIO, BRULS RICHARD JOSEPH, ALBRIGHT RONALD PETER, KOCHERSPERGER PETER CONRAD
Year of Publication 20.10.2020
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Year of Publication 20.10.2020
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MASK ASSEMBLY
VAN DEN HEIJKANT SANDER, KRAMER RONALD HARM GUNTHER, LIPSON MATTHEW, LYONS JOSEPH H, BOGAART ERIK WILLEM, VAN DER MEULEN FRITS, KAMALI MOHAMMAD REZA, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, LEENDERS MARTINUS HENDRIKUS ANTONIUS, BROUNS DERK SERVATIUS GERTRUDA, VAN DEN BOSCH GERRIT, AZEREDO LIMA JORGE MANUEL, LOOPSTRA ERIK ROELOF, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, VAN DER GRAAF SANDRA, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, BRULS RICHARD JOSEPH, DEKKERS JEROEN, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, ROUX STEPHEN
Year of Publication 19.10.2023
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Year of Publication 19.10.2023
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미립자 파편의 궤적을 변경하기 위한 편향 장치를 구비한 리소그래피 시스템
NENCHEV GEORGI NENCHEV, VAN DE KERKHOF MARCUS ADRIANUS, JACOBS JOHANNES HENRICUS WILHELMUS, MOORS JOHANNES HUBERTUS JOSEPHINA, UZGOREN ERAY, BAL KURSAT, HUANG YANG SHAN, RANJAN MANISH, DE VRIES SJOERD FRANS, ALBRIGHT RONALD PETER, YAGHOOBI PARHAM, BANINE VADIM YEVGENYEVICH, HUANG ZHUANGXIONG, NIKIPELOV ANDREY, BRULS RICHARD JOSEPH, RAASVELD THOMAS MAARTEN, FRIJNS OLAV WALDEMAR VLADIMIR, UMSTADTER KARL ROBERT, TE SLIGTE EDWIN
Year of Publication 27.09.2022
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Year of Publication 27.09.2022
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MASK ASSEMBLY
VAN DEN HEIJKANT SANDER, KRAMER RONALD HARM GUNTHER, LIPSON MATTHEW, LYONS JOSEPH H, BOGAART ERIK WILLEM, VAN DER MEULEN FRITS, KAMALI MOHAMMAD REZA, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, LEENDERS MARTINUS HENDRIKUS ANTONIUS, BROUNS DERK SERVATIUS GERTRUDA, VAN DEN BOSCH GERRIT, AZEREDO LIMA JORGE MANUEL, LOOPSTRA ERIK ROELOF, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, VAN DER GRAAF SANDRA, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, BRULS RICHARD JOSEPH, DEKKERS JEROEN, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, ROUX STEPHEN
Year of Publication 24.10.2022
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Year of Publication 24.10.2022
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METHODS APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO A LITHOGRAPHIC MANUFACTURING PROCESS LITHOGRAPHIC PROCESSING SYSTEM INCLUDING DIAGNOSTIC APPARATUS
HAUPTMANN MARC, DAVIES DYLAN JOHN DAVID, TSUGAMA NAOKO, VIEYRA SALAS JORGE ALBERTO, JANSSEN PAUL, JANSSEN EDWIN JOHANNES MARIA, HOEKERD KORNELIS TIJMEN, BRULS RICHARD JOSEPH, VAN DER WILK RONALD, VAN SCHIJNDEL ANTONIUS HUBERTUS, VAN DEN OEVER PETRUS JOHANNES
Year of Publication 03.07.2019
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Year of Publication 03.07.2019
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METHODS APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO A LITHOGRAPHIC MANUFACTURING PROCESS LITHOGRAPHIC PROCESSING SYSTEM INCLUDING DIAGNOSTIC APPARATUS
HAUPTMANN MARC, DAVIES DYLAN JOHN DAVID, TSUGAMA NAOKO, VIEYRA SALAS JORGE ALBERTO, JANSSEN PAUL, JANSSEN EDWIN JOHANNES MARIA, HOEKERD KORNELIS TIJMEN, BRULS RICHARD JOSEPH, VAN DER WILK RONALD, VAN SCHIJNDEL ANTONIUS HUBERTUS, VAN DEN OEVER PETRUS JOHANNES
Year of Publication 26.07.2017
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Year of Publication 26.07.2017
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MASK ASSEMBLY
VAN DEN HEIJKANT SANDER, KRAMER RONALD HARM GUNTHER, LIPSON MATTHEW, LYONS JOSEPH H, BOGAART ERIK WILLEM, VAN DER MEULEN FRITS, KAMALI MOHAMMAD REZA, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, LEENDERS MARTINUS HENDRIKUS ANTONIUS, BROUNS DERK SERVATIUS GERTRUDA, VAN DEN BOSCH GERRIT, AZEREDO LIMA JORGE MANUEL, LOOPSTRA ERIK ROELOF, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, VAN DER GRAAF SANDRA, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, BRULS RICHARD JOSEPH, DEKKERS JEROEN, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, ROUX STEPHEN
Year of Publication 01.08.2017
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Year of Publication 01.08.2017
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
JANSEN HANS, SENGERS TIMOTHEUS FRANCISCUS, SERGEI SHULEPOV, MULKENS JOHANNES CATHARINUS HUBERTUS, BOOM HERMAN, BOB STREEFKERK, LOOPSTRA ERIK ROELOF, RONALD WALTER JIIN SEVERYNS, BRULS RICHARD JOSEPH, DIERICHS MARCLE MATHIJS T M, CHRISTIANE ALEXANDER HOGENDAM, JOHANNES JACOBS MATEUS BASELMANS, SECHELT NICHOLAS LAMBELDUS DONDERS, JEROEN JOHANNES SOPHIA MARIA MERTENS
Year of Publication 06.10.2016
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Year of Publication 06.10.2016
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LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING LITHOGRAPHIC APPARATUS
MIRANDA MARCIO ALEXANDRE CANO, NOORDAM LAMBERTUS DOMINICUS, JANSEN HANS, JORRITSMA LAURENTIUS CATRINUS, BRUIJSTENS JEROEN PETER JOHANNES, JANSEN BAUKE, TANASA GHEORGHE, THOMAS IVO ADAM JOHANNES, BRULS RICHARD JOSEPH, SIEBE LANDHEER, MEESTER ARNOUT JOHANNES, VAN DER LEE MAURICE MARTINUS JOHANNES
Year of Publication 06.08.2015
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Year of Publication 06.08.2015
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SYSTEM FOR REMOVING CONTAMINANT PARTICLES, LITHOGRAPHIC APPARATUS, METHOD FOR REMOVING CONTAMINANT PARTICLES AND METHOD FOR MANUFACTURING A DEVICE
SCACCABAROZZI LUIGI, LOOPSTRA ERIK ROELOF, YAKUNIN ANDREI, BANINE VADIM YEVGENYEVICH, NEERHOF HENDRIK, SIDELNIKOV YURII, BRULS RICHARD JOSEPH, IVANOV VLADIMIR, ANTSIFEROV PAVEL
Year of Publication 27.05.2013
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Year of Publication 27.05.2013
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
JANSEN HANS, SENGERS TIMOTHEUS FRANCISCUS, SERGEI SHULEPOV, MULKENS JOHANNES CATHARINUS HUBERTUS, BOOM HERMAN, BOB STREEFKERK, LOOPSTRA ERIK ROELOF, RONALD WALTER JIIN SEVERYNS, BRULS RICHARD JOSEPH, DIERICHS MARCLE MATHIJS T M, CHRISTIANE ALEXANDER HOGENDAM, JOHANNES JACOBS MATEUS BASELMANS, SECHELT NICHOLAS LAMBELDUS DONDERS, JEROEN JOHANNES SOPHIA MARIA MERTENS
Year of Publication 16.07.2015
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Year of Publication 16.07.2015
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LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
MIRANDA MARCIO ALEXANDRE CANO, JANSEN HANS, BRUIJSTENS JEROEN PETER JOHANNES, JANSEN BAUKE, TANASA GHEORGHE, THOMAS IVO ADAM JOHANNES, BRULS RICHARD JOSEPH, MEESTER ARNOUT JOHANNES, LANDHEER SIEBE
Year of Publication 25.03.2010
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Year of Publication 25.03.2010
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SUBSTRATES AND METHODS OF USING THOSE SUBSTRATES
WANTEN PETER FRANCISCUS, JANSEN HANS, DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS, VAN DER GRAAF SANDRA, VAN DER DONCK JACQUES COR JOHAN, VAN DEN BOGAARD FREDERIK JOHANNES, GROENEWOLD JAN, BRULS RICHARD JOSEPH, BOUCHOMS IGOR PETRUS MARIA, LEENDERS MARTINUS HENDRIKUS ANTONIUS, VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS, ZOLDESI CARMEN JULIA
Year of Publication 07.09.2010
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Year of Publication 07.09.2010
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
LIEBREGTS PAULUS MARTINUS MARIA, VAN DOMMELEN YOURI JOHANNES LAURENTIUS MARIA, BADAM VIJAY KUMAR, DE GROOT CASPER RODERIK, JACOBS JOHANNES HENRICUS WILHELMUS, VAN DER HOEVEN JAN CORNELIS, BRANDS GERT JAN GERARDUS JOHANNES THOMAS, STAVENGA MARCO KOERT, KAMPHUIS MARTIJN HENDRIK, ANSTOTZ DAVID LUCIEN, KNAAPEN THIJS EGIDIUS JOHANNES, PELLENS RUDY JAN MARIA, BRULS RICHARD JOSEPH, VAN DER ZANDEN MARCUS JOHANNES, VERSPAGET COEN CORNELIS WILHELMUS, MAAS RUDOLF ADRIANUS JOANNES
Year of Publication 17.06.2010
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Year of Publication 17.06.2010
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LITHOGRAPHIC APPARATUS FOR REDUCING TIME NEEDED FOR EXCHANGE BETWEEN RETICLE WITH PELLICLE AND RETICLE WITHOUT PELLICLE, AND DEVICE MANUFACTURING METHOD
JASPER JOHANNES CHRISTIAAN MARIA, PONGERS WILLEM RICHARD, BRULS RICHARD JOSEPH, BASELMANS JOHANNES JACOBUS MATHEUS, UITTERDIJK TAMMO, JANSEN ALBERT JOHANNES MARIA, SCHRIJVER RAYMOND LAURENTIUS JOHANNES, BAGGEN MARCEL KOENRAAD MARIE
Year of Publication 02.07.2004
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Year of Publication 02.07.2004
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LITHOGRAPHIC APPARATUS FOR COUNTERVAILING INFLUENCE OF THICK PELLICLE, DEVICE MANUFACTURING METHOD, MASK, AND MASK AND/OR PELLICLE CHARACTERIZING METHOD
JASPER JOHANNES CHRISTIAAN MARIA, PONGERS WILLEM RICHARD, BOOM HERMAN, JANSEN ALBERT JOHANNES MARIA, HOFMANS GERARDUS CAROLUS JOHANNUS, BRULS RICHARD JOSEPH, UITTERDIJK TAMMO, CICILIA ORLANDO SERAPIO, DEMARTEAU MARCEL JOHANNES LOUIS MARIE, WEHRENS MARTIJN GERARD DOMINIQUE, VANDIJCK HENDRIKUS ALPHONSUS LUDOVICUS, BAGGEN MARCEL KOENRAAD MARIE, LUIJTEN CARLO CORNELIS MARIA
Year of Publication 09.11.2004
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Year of Publication 09.11.2004
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Particle suppression systems and methods
Kochersperger, Peter Conrad, Huang, Yang-Shan, Bruls, Richard Joseph, Nienhuys, Han-Kwang, Brinkert, Jacob, Boonen, Marcel Joseph Louis
Year of Publication 05.10.2021
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Year of Publication 05.10.2021
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