Device for the generation of a gas curtain for plasma-based EUV radiation sources
MADER BJOERN, BRUDERMANN JESKO, BRAUNER THOMAS, DORNIEDEN GILBERT, TRAN CHINH DUC
Year of Publication 06.07.2010
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Year of Publication 06.07.2010
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Device for the generation of a gas curtain for plasma-based EUV radiation sources
Tran, Chinh Duc, Brudermann, Jesko, Mader, Bjoern, Dornieden, Gilbert, Brauner, Thomas
Year of Publication 06.07.2010
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Year of Publication 06.07.2010
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Einrichtung zur Erzeugung eines Gasvorhangs für plasmabasierte EUV-Strahlungsquellen
TRAN, DUC CHINH, DORNIEDEN, GILBERT, BRUDERMANN, JESKO, MADER, BJOERN, BRAUNER, THOMAS
Year of Publication 09.04.2009
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Year of Publication 09.04.2009
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DEVICE FOR FORMING GAS CURTAIN FOR PLASMA-BASED EUV RADIATION SOURCE
MADER BJOERN, BRUDERMANN JESKO, BRAUNER THOMAS, DORNIEDEN GILBERT, TRAN CHINH DUC
Year of Publication 11.12.2008
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Year of Publication 11.12.2008
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DEVICE FOR THE GENERATION OF A GAS CURTAIN FOR PLASMA-BASED EUV RADIATION SOURCES
MADER BJOERN, BRUDERMANN JESKO, BRAUNER THOMAS, DORNIEDEN GILBERT, TRAN CHINH DUC
Year of Publication 20.11.2008
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Year of Publication 20.11.2008
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DEVICE FOR RESTRAINING UNDESIRABLE SPECTRUM COMPONENTS IN EUV RADIATION SOURCE BASED ON PLASMA
KLEINSCHMIDT JUERGEN, MADER BJOERN, BRUDERMANN JESKO, TRAN CHINH DUC, BRUIJN RENE DE
Year of Publication 24.05.2007
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Year of Publication 24.05.2007
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