Search Results - "BRUCH JENS U" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Method for carrying out a double or multiple exposure

Method for carrying out a double or multiple exposure

by SCHUMACHER KARL, STACKER JENS, BRUCH JENS U, HOMMEN HEIKO, STROBL MARLENE
Year of Publication 19.05.2005

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Patent

Method for determining the relative positional accuracy of two structure elements on a wafer

Method for determining the relative positional accuracy of two structure elements on a wafer

by STACKER JENS, BRUCH JENS U, HOMMEN HEIKO, FERNANDEZ-MARTINEZ MARIA DE LA PIEDAD, SCHEDEL THORSTEN
Year of Publication 24.11.2005

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Patent