Laser system
FOMENKOV IGOR V, ERSHOV ALEXANDER I, PARTLO WILLIAM N, LALOVIC IVAN, SANDSTROM RICHARD L, BERGSTEDT ROBERT A, BROWN DANIEL J. W
Year of Publication 08.02.2011
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Year of Publication 08.02.2011
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Laser system
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Year of Publication 08.02.2011
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Year of Publication 08.02.2011
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LPP EUV light source
FOMENKOV IGOR V, PARTLO WILLIAM N, ERSHOV ALEXANDER I, MYERS DAVID W, BROWN DANIEL J. W
Year of Publication 08.01.2008
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Year of Publication 08.01.2008
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LPP EUV light source
Partlo, William N, Brown, Daniel J. W, Fomenkov, Igor V, Ershov, Alexander I, Myers, David W
Year of Publication 08.01.2008
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Year of Publication 08.01.2008
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LPP EUV DRIVE LASER
FLEUROV, VLADIMIR, B, ERSHOV, ALEXANDER, I, FOMENKOV, IGOR, V, PARTLO, WILLIAM, N, BROWN, DANIEL, J., W
Year of Publication 13.12.2007
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Year of Publication 13.12.2007
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LPP EUV DRIVE LASER
FLEUROV, VLADIMIR, B, ERSHOV, ALEXANDER, I, FOMENKOV, IGOR, V, PARTLO, WILLIAM, N, BROWN, DANIEL, J., W
Year of Publication 05.12.2007
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Year of Publication 05.12.2007
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LPP EUV DRIVE LASER
FOMENKOV IGOR V, ERSHOV ALEXANDER I, PARTLO WILLIAM N, FLEUROV VLADIMIR B, BROWN DANIEL J. W
Year of Publication 29.11.2007
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Year of Publication 29.11.2007
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LPP EUV LIGHT SOURCE
ERSHOV, ALEXANDER, I, FOMENKOV, IGOR, V, RETTIG, CURTIS, L, HANSSON, BJORN, A., M, MACFARLANE, JOSEPH, J, PARTLO, WILLIAM, N, BOWERING, NORBERT R, BROWN, DANIEL, J., W
Year of Publication 18.08.2010
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Year of Publication 18.08.2010
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Adaptive laser system for an extreme ultraviolet light source
TAO, YEZHENG, AMADA, YOSHIHO, SCHAFGANS, ALEXANDER, GOLICH, DANIEL J, BROWN, DANIEL J. W, CAUDILL, MICHAEL DAVID, SANDSTROM, RICHARD L
Year of Publication 16.09.2015
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Year of Publication 16.09.2015
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GAS DISCHARGE LASER CHAMBER
PARTLO WILLIAM N, MOOSMAN BRYAN G, DUFFEY THOMAS P, SANDSTROM RICHARD L, CHUNG TAE H, BROWN DANIEL J. W, FERRELL JAMES J, HILSABECK TERANCE
Year of Publication 10.06.2010
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Year of Publication 10.06.2010
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Laser system
FOMENKOV IGOR V, ERSHOV ALEXANDER I, PARTLO WILLIAM N, LALOVIC IVAN, SANDSTROM RICHARD L, BERGSTEDT ROBERT A, BROWN DANIEL J. W
Year of Publication 06.05.2010
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Year of Publication 06.05.2010
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LASER OUTPUT BEAM WAVEFRONT SPLITTER FOR BANDWIDTH SPECTRUM CONTROL
ERSHOV, ALEXANDER, I, SANDSTROM, RICHARD, L, FOMENKOV, IGOR, V, PARTLO, WILLIAM, N, BROWN, DANIEL, J., W
Year of Publication 28.03.2007
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Year of Publication 28.03.2007
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LASER OUTPUT BEAM WAVEFRONT SPLITTER FOR BANDWIDTH SPECTRUM CONTROL
FOMENKOV IGOR V, ERSHOV ALEXANDER I, PARTLO WILLIAM N, SANDSTROM RICHARD L, BROWN DANIEL J. W
Year of Publication 12.03.2007
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Year of Publication 12.03.2007
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LASER WAVELENGTH CONTROL UNIT WITH PIEZOELECTRIC DRIVER
ALGOTS, JOHN, M, SPANGLER, RONALD, L, PALENSCHAT, FREDERICK, A, SANDSTROM, RICHARD, L, FOMENKOV, IGOR, V, EVERAGE, GEORGE, J, PARTLO, WILLIAM, N, JACQUES, ROBERT, N, BROWN, DANIEL, J., W, ANDERSON, STUART, L
Year of Publication 24.08.2011
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Year of Publication 24.08.2011
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HIGH RESOLUTION SPECTRAL MEASUREMENT DEVICE
ERSHOV, ALEXANDER, I, SANDSTROM, RICHARD, L, FOMENKOV, IGOR, V, PARTLO, WILLIAM, N, BROWN, DANIEL, J., W, SMITH, SCOTT, T
Year of Publication 24.09.2008
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Year of Publication 24.09.2008
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VERY HIGH POWER LASER CHAMBER OPTICAL IMPROVEMENTS
ERSHOV, ALEXANDER, I, VIATELLA, JOHN, W, RAO, RAJASEKHAR, H, DUFFEY, THOMAS, P, ROKITSKI, ROSTISLAVA, BERGSTEDT, ROBERT, A, BROWN, DANIEL, J. W, FERRELL, JAMES, J, CYBULSKI, RAYMOND, F, LIU, LAUREN, YE, HONG
Year of Publication 03.08.2011
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Year of Publication 03.08.2011
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Laser output beam wavefront splitter for bandwidth spectrum control
Sandstrom, Richard L, Brown, Daniel J. W, Ershov, Alexander I, Fomenkov, Igor V, Partlo, William N
Year of Publication 26.12.2006
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Year of Publication 26.12.2006
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Laser output beam wavefront splitter for bandwidth spectrum control
FOMENKOV IGOR V, ERSHOV ALEXANDER I, PARTLO WILLIAM N, SANDSTROM RICHARD L, BROWN DANIEL J. W
Year of Publication 26.12.2006
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Year of Publication 26.12.2006
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LPP EUV DRIVE LASER
FLEUROV, VLADIMIR, B, ERSHOV, ALEXANDER, I, FOMENKOV, IGOR, V, PARTLO, WILLIAM, N, BROWN, DANIEL, J., W
Year of Publication 08.09.2006
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Year of Publication 08.09.2006
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Relax gas discharge laser lithography light source
ERSHOV, ALEXANDER I., YAGER, THOMAS A, PARTLO, WILLIAM N, BROWN, DANIEL J. W, SANDSTROM, RICHARD L
Year of Publication 11.07.2006
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Year of Publication 11.07.2006
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