MASK ASSEMBLY AND ASSOCIATED METHODS
SMITH DANIEL ANDREW, DE GRAAF DENNIS, DE KRUIF ROBERTUS CORNELIS MARTINUS, JANSSEN PAUL, KRUIZINGA MATTHIAS, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, BROUNS DERK SERVATIUS GERTRUDA, NOTENBOOM ARNOUD WILLEM, WILEY JAMES NORMAN
Year of Publication 19.12.2023
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Year of Publication 19.12.2023
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MASK ASSEMBLY
VAN DEN HEIJKANT SANDER, KRAMER RONALD HARM GUNTHER, LIPSON MATTHEW, LYONS JOSEPH H, BOGAART ERIK WILLEM, VAN DER MEULEN FRITS, KAMALI MOHAMMAD REZA, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, LEENDERS MARTINUS HENDRIKUS ANTONIUS, BROUNS DERK SERVATIUS GERTRUDA, VAN DEN BOSCH GERRIT, AZEREDO LIMA JORGE MANUEL, LOOPSTRA ERIK ROELOF, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, VAN DER GRAAF SANDRA, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, BRULS RICHARD JOSEPH, DEKKERS JEROEN, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, ROUX STEPHEN
Year of Publication 19.10.2023
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Year of Publication 19.10.2023
Patent
MASK ASSEMBLY AND ASSOCIATED METHODS
SMITH DANIEL ANDREW, DE GRAAF DENNIS, DE KRUIF ROBERTUS CORNELIS MARTINUS, JANSSEN PAUL, KRUIZINGA MATTHIAS, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, BROUNS DERK SERVATIUS GERTRUDA, NOTENBOOM ARNOUD WILLEM, WILEY JAMES NORMAN
Year of Publication 26.01.2022
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Year of Publication 26.01.2022
Patent
EUV Membrane for EUV lithography
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 16.02.2023
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Year of Publication 16.02.2023
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APPARATUS
VAN DER MEULEN FRITS, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, BROUNS DERK SERVATIUS GERTRUDA, DINGS JACOBUS MARIA, AZEREDO LIMA JORGE MANUEL, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, KERSTENS ROLAND JACOBUS JOHANNES, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, LOOS MICHEL, KRAMER RONALD HARM GUNTHER, MIDDEL GEERT, THEUERZEIT FRANK JOHANNES CHRISTIAAN, DE KLERK ANGELO CESAR PETER, LEENDERS MARTINUS HENDRIKUS ANTONIUS, VAN DEN BOSCH GERRIT, LOOPSTRA ERIK ROELOF, REIJNDERS SILVESTER MATHEUS, VAN LIEVENOOGEN ANNE JOHANNES WILHELMUS, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, JANSSEN MAURICE LEONARDUS JOHANNES, DEKKERS JEROEN, KESTERS MARTINUS JOZEF MARIA
Year of Publication 23.06.2023
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Year of Publication 23.06.2023
Patent
MASK ASSEMBLY
VAN DEN HEIJKANT SANDER, KRAMER RONALD HARM GUNTHER, LIPSON MATTHEW, LYONS JOSEPH H, BOGAART ERIK WILLEM, VAN DER MEULEN FRITS, KAMALI MOHAMMAD REZA, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, LEENDERS MARTINUS HENDRIKUS ANTONIUS, BROUNS DERK SERVATIUS GERTRUDA, VAN DEN BOSCH GERRIT, AZEREDO LIMA JORGE MANUEL, LOOPSTRA ERIK ROELOF, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, VAN DER GRAAF SANDRA, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, BRULS RICHARD JOSEPH, DEKKERS JEROEN, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, ROUX STEPHEN
Year of Publication 24.10.2022
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Year of Publication 24.10.2022
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레티클 조립체의 조립을 위한 장치
VAN DEN BERG JOHANNES CHARLES ADRIANUS, VAN DER CHIJS WOUTER, SNEL MARCEL DUCO, BROUNS DERK SERVATIUS GERTRUDA, MALAKHOVSKY ILYA, CRAQUELIN JOFFREY RENE SYLVIAN, VAN KUIJK MIKE JOHANNES ANTONIUS, HENNUS PIETER RENAAT MARIA, POSTMA LUDOLF, VAN DER VEEK BARTEL JORIS, VAN UUM VAN HERK MARINA ANTOINETTA LEONARDA, HAGE EDWARD, OOSTERLING JAN WILLEM ADRIAAN, WIERSMA HENRICUS MARINUS THEODORUS
Year of Publication 28.10.2021
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Year of Publication 28.10.2021
Patent
EUV Membrane for EUV lithography
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 24.12.2021
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Year of Publication 24.12.2021
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멤브레인 어셈블리
PETER MARIA, JANSSEN PAUL, KAMALI MOHAMMAD REZA, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, VAN ZWOL PIETER JAN, BROUNS DERK SERVATIUS GERTRUDA, VAN DER ZANDE WILLEM JOAN
Year of Publication 22.08.2018
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Year of Publication 22.08.2018
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APPARATUS
VAN DER MEULEN FRITS, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, BROUNS DERK SERVATIUS GERTRUDA, DINGS JACOBUS MARIA, AZEREDO LIMA JORGE MANUEL, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, KERSTENS ROLAND JACOBUS JOHANNES, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, LOOS MICHEL, KRAMER RONALD HARM GUNTHER, MIDDEL GEERT, THEUERZEIT FRANK JOHANNES CHRISTIAAN, DE KLERK ANGELO CESAR PETER, LEENDERS MARTINUS HENDRIKUS ANTONIUS, VAN DEN BOSCH GERRIT, LOOPSTRA ERIK ROELOF, REIJNDERS SILVESTER MATHEUS, VAN LIEVENOOGEN ANNE JOHANNES WILHELMUS, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, JANSSEN MAURICE LEONARDUS JOHANNES, DEKKERS JEROEN, KESTERS MARTINUS JOZEF MARIA
Year of Publication 06.12.2019
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Year of Publication 06.12.2019
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마스크 어셈블리 및 연관된 방법
SMITH DANIEL ANDREW, VERBRUGGE BEATRIJS LOUISE MARIE-JOSEPH KATRIEN, DE GRAAF DENNIS, DE KRUIF ROBERTUS CORNELIS MARTINUS, JANSSEN PAUL, KRUIZINGA MATTHIAS, BROUNS DERK SERVATIUS GERTRUDA, NOTENBOOM ARNOUD WILLEM, WILEY JAMES NORMAN
Year of Publication 27.09.2017
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Year of Publication 27.09.2017
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펠리클 및 펠리클 조립체
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, JANSSEN PAUL, VLES DAVID FERDINAND, ABEGG ERIK ACHILLES, VOORTHUIJZEN WILLEM PIETER, GOVIL PRADEEP K, VAN ZWOL PIETER JAN, BENDIKSEN AAGE, VAN DER ZANDE WILLEM JOAN, NOTENBOOM ARNOUD WILLEM, WILEY JAMES NORMAN
Year of Publication 27.08.2018
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Year of Publication 27.08.2018
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EUV 리소그래피를 위한 멤브레인
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 20.12.2018
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Year of Publication 20.12.2018
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