High deposition rate nanocrystalline and amorphous silicon thin film production via surface wave plasma source
Peck, Jason A., Zonooz, Piyum, Curreli, Davide, Panici, Gianluca A., Jurczyk, Brian E., Ruzic, David N.
Published in Surface & coatings technology (25.09.2017)
Published in Surface & coatings technology (25.09.2017)
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Journal Article
Experimental test chamber design for optics exposure testing and debris characterization of a xenon discharge produced plasma source for extreme ultraviolet lithography
Thompson, Keith C., Antonsen, Erik L., Hendricks, Matthew R., Jurczyk, Brian E., Williams, M., Ruzic, D.N.
Published in Microelectronic engineering (01.03.2006)
Published in Microelectronic engineering (01.03.2006)
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Journal Article
Reduction of Ion Energies From a Multicomponent Z -Pinch Plasma
Ruzic, D.N., Thompson, K.C., Jurczyk, B.E., Antonsen, E.L., Srivastava, S.N., Spencer, J.B.
Published in IEEE transactions on plasma science (01.06.2007)
Published in IEEE transactions on plasma science (01.06.2007)
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Journal Article
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Year of Publication 07.03.2024
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Year of Publication 07.03.2024
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BELLOWS COATING BY MAGNETRON SPUTTERING WITH KICK PULSE
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Year of Publication 29.11.2023
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Year of Publication 29.11.2023
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Associated particle detection for performing neutron flux calibration and imaging
Stubbers, Robert A, Coventry, Matthew D, Alman, Darren A, Jurczyk, Brian E
Year of Publication 13.06.2023
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Year of Publication 13.06.2023
Patent
FOOD IRRADIATION DOSE UNIFORMITY
Stubbers, Robert A, Houlahan, JR., Thomas J, Coventry, Matthew D, Alman, Darren A, Jurczyk, Brian E
Year of Publication 07.03.2024
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Year of Publication 07.03.2024
Patent
BELLOWS COATING BY MAGNETRON SPUTTERING WITH KICK PULSE
JURCZYK, Brian E, HAEHNLEIN, Ian F, MENET, Daniel P, HOULAHAN, Thomas J, STUBBERS, Robert A
Year of Publication 28.07.2022
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Year of Publication 28.07.2022
Patent
A COMPACT SYSTEM FOR COUPLING RF POWER DIRECTLY INTO AN ACCELERATOR
JURCZYK, Brian E, POTTER, James M, HOULAHAN, JR., Thomas J, STUBBERS, Robert A
Year of Publication 16.03.2022
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Year of Publication 16.03.2022
Patent
BELLOWS COATING BY MAGNETRON SPUTTERING WITH KICK PULSE
Stubbers, Robert A, Houlahan, JR., Thomas J, Menet, Daniel P, Haehnlein, Ian F, Jurczyk, Brian E
Year of Publication 21.07.2022
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Year of Publication 21.07.2022
Patent
ASSOCIATED PARTICLE DETECTION FOR PERFORMING NEUTRON FLUX CALIBRATION AND IMAGING
Stubbers, Robert A, Coventry, Matthew D, Alman, Darren A, Jurczyk, Brian E
Year of Publication 08.07.2021
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Year of Publication 08.07.2021
Patent
A COMPACT SYSTEM FOR COUPLING RF POWER DIRECTLY INTO RF LINACS
JURCZYK, Brian E, POTTER, James M, HOULAHAN, JR., Thomas J, STUBBERS, Robert A
Year of Publication 24.06.2020
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Year of Publication 24.06.2020
Patent