Defect probability-based process window
HUNSCHE STEFAN, RISPENS GIJSBERT, VAN INGEN SCHLAU KOENRAAD, PETERSON BRENNAN, TEL WIM TJIBBO, SLACHTER ABRAHAM, VAN OOSTEN ANTON BERNHARD
Year of Publication 31.03.2023
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Year of Publication 31.03.2023
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Methods and systems for inspecting integrated circuits based on X-rays
SIM, HAK CHUAH, REID, ANDREW GEORGE, PETERSON, BRENNAN LOVELACE, DAWAHRE OLIVIERI, NABIL FARAH
Year of Publication 01.04.2022
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Year of Publication 01.04.2022
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Metrology Apparatus and Method for Determining a Characteristic of One or More Structures on a Substrate
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Year of Publication 12.12.2019
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Year of Publication 12.12.2019
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Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
BRENNAN PETERSON, LORENZO TRIPODI, SCOTT ANDERSON MIDDLEBROOKS, ANTON BERNHARD VAN OOSTEN, PATRICIUS ALOYSIUS JACOBUS TINNEMANS, ADRIANUS CORNELIS MATHEUS KOOPMAN, FARZAD FARHADZADEH, FRANK STAALS, MOHAMMADREZA HAJIAHMADI
Year of Publication 06.11.2018
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Year of Publication 06.11.2018
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Measurement mark,measurement system and measurement method
VAN GORP, SIMON HENDRIK CELINE, HASTINGS, SIMON PHILIP SPENCER, PETERSON, BRENNAN, TABERY, CYRUS EMIL
Year of Publication 11.10.2021
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Year of Publication 11.10.2021
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Measurement and endpointing of sample thickness
MORIARTY, MICHAEL, PETERSON, BRENNAN, SCHAMPERS, RUUD, YOUNG, RICHARD
Year of Publication 12.03.2014
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Year of Publication 12.03.2014
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Measurement and endpointing of sample thickness
MORIARTY MICHAEL, PETERSON BRENNAN, YOUNG RICHARD J, SCHAMPERS RUDOLF JOHANNES PETER GERARDUS
Year of Publication 10.11.2015
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Year of Publication 10.11.2015
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Method for determining characteristic of interest related to structure on substrate, reticle, substrate
KOOPMAN, ADRIANUS CORNELIS MATTHEUS, HAJMANDA, MOHAMMAD, STAALS FRANK, TRIPODI LORENZO, MIDDLEBROOKS SCOTT A, WARNAAR PATRICK, TINNEMANS PATRICIUS ALOYSIUS JACOBUS, GRZELA GRZEGORZ, PETERSON BRENNAN, FARHADZAD, FARHAD, VAN OOSTEN ANTON BERNHARD
Year of Publication 15.09.2023
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Year of Publication 15.09.2023
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VOLTAGE CONTRAST METROLOGY MARK
HASTINGS SIMON PHILIP SPENCER, VAN GORP SIMON HENDRIK CELINE, PETERSON BRENNAN, TABERY CYRUS EMIL
Year of Publication 24.07.2020
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Year of Publication 24.07.2020
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Measurement and endpointing of sample thickness
MORIARTY, MICHAEL, PETERSON, BRENNAN, SCHAMPERS, RUUD, YOUNG, RICHARD
Year of Publication 21.11.2012
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Year of Publication 21.11.2012
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INFORMATION DETERMINING APPARATUS AND METHOD
NIKIPELOV ANDREY, POLYAKOV ALEXEY O, PETERSON BRENNAN, GAO AN, LALBAHADOERSING SANJAYSINGH
Year of Publication 01.05.2020
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Year of Publication 01.05.2020
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