Method for producing a membrane sensor and corresponding membrane sensor
SCHAEFER, Frank, BRASAS, Joerg, LAMMEL, Gerhard, BENZEL, Hubert, ARMBRUSTER, Simon, SCHELLING, Christoph
Year of Publication 24.02.2021
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Year of Publication 24.02.2021
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Micromechanical capacitive pressure transducer and production method
BENZEL HUBERT, BRASAS JOERG, SCHELLING CHRISTOPH, LAMMEL GERHARD, ARMBRUSTER SIMON
Year of Publication 23.07.2013
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Year of Publication 23.07.2013
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Micromechanical Capacitive Pressure Transducer and Production Method
BENZEL HUBERT, BRASAS JOERG, SCHELLING CHRISTOPH, LAMMEL GERHARD, ARMBRUSTER SIMON
Year of Publication 23.04.2009
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Year of Publication 23.04.2009
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ELEMENT DE CAPTEUR MICROMECANIQUE
BENZEL HUBERT, SCHAEFER FRANK, BRASAS JOERG, FINKBEINER STEFAN, SCHELLING CHRISTOPH, LAMMEL GERHARD, ARMBRUSTER SIMON, ILLING MATTHIAS
Year of Publication 15.07.2011
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Year of Publication 15.07.2011
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MICROMECHANICAL CAPACITIVE PRESSURE TRANSDUCER AND PRODUCTION METHOD
BENZEL HUBERT, BRASAS JOERG, SCHELLING CHRISTOPH, LAMMEL GERHARD, ARMBRUSTER SIMON
Year of Publication 04.09.2008
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Year of Publication 04.09.2008
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Micromechanical semiconductor sensor
BENZEL HUBERT, SCHAEFER FRANK, BRASAS JOERG, SCHELLING CHRISTOPH, LAMMEL GERHARD, ARMBRUSTER SIMON
Year of Publication 30.11.2010
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Year of Publication 30.11.2010
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Micromechanical semiconductor sensor
Benzel, Hubert, Schaefer, Frank, Armbruster, Simon, Lammel, Gerhard, Schelling, Christoph, Brasas, Joerg
Year of Publication 30.11.2010
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Year of Publication 30.11.2010
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Semiconductor component configured as a diaphragm sensor
Benzel, Hubert, Schaefer, Frank, Armbruster, Simon, Lammel, Gerhard, Schelling, Christoph, Brasas, Joerg
Year of Publication 13.07.2010
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Year of Publication 13.07.2010
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Semiconductor component configured as a diaphragm sensor
BENZEL HUBERT, SCHAEFER FRANK, BRASAS JOERG, SCHELLING CHRISTOPH, LAMMEL GERHARD, ARMBRUSTER SIMON
Year of Publication 13.07.2010
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Year of Publication 13.07.2010
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Method for manufacturing a micromechanical sensor element
BENZEL HUBERT, SCHAEFER FRANK, BRASAS JOERG, FINKBEINER STEFAN, SCHELLING CHRISTOPH, LAMMEL GERHARD, ARMBRUSTER SIMON, ILLING MATTHIAS
Year of Publication 11.08.2009
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Year of Publication 11.08.2009
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Method for manufacturing a micromechanical sensor element
Benzel, Hubert, Finkbeiner, Stefan, Illing, Matthias, Schaefer, Frank, Armbruster, Simon, Lammel, Gerhard, Schelling, Christoph, Brasas, Joerg
Year of Publication 11.08.2009
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Year of Publication 11.08.2009
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Method for manufacturing a diaphragm sensor
Benzel, Hubert, Schaefer, Frank, Armbruster, Simon, Lammel, Gerhard, Schelling, Christoph, Brasas, Joerg
Year of Publication 04.08.2009
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Year of Publication 04.08.2009
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Method for manufacturing a diaphragm sensor
BENZEL HUBERT, SCHAEFER FRANK, BRASAS JOERG, SCHELLING CHRISTOPH, LAMMEL GERHARD, ARMBRUSTER SIMON
Year of Publication 04.08.2009
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Year of Publication 04.08.2009
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Verfahren zur Herstellung eines mikromechanischen Sensorelements
SCHAEFER, FRANK, ARMBRUSTER, SIMON, SCHELLING, CHRISTOPH, LAMMEL, GERHARD, BENZEL, HUBERT, ILLING, MATTHIAS, BRASAS, JOERG, FINKBEINER, STEFAN
Year of Publication 22.10.2015
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Year of Publication 22.10.2015
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Method for manufacturing a membrane sensor
BENZEL HUBERT, SCHAEFER FRANK, BRASAS JOERG, SCHELLING CHRISTOPH, LAMMEL GERHARD, ARMBRUSTER SIMON
Year of Publication 24.02.2009
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Year of Publication 24.02.2009
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Method for manufacturing a membrane sensor
Benzel, Hubert, Schaefer, Frank, Armbruster, Simon, Lammel, Gerhard, Schelling, Christoph, Brasas, Joerg
Year of Publication 24.02.2009
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Year of Publication 24.02.2009
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