Image aberrations in optical three-dimensional measurement systems with fringe projection
Brakhage, Peter, Notni, Gunther, Kowarschik, Richard
Published in Applied optics (2004) (01.06.2004)
Published in Applied optics (2004) (01.06.2004)
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Journal Article
Image sensor for immersion lithography
Tilke, Martin, Banerjee, Nirupam, Brakhage, Peter, Beckers, Johan Franciscus Maria, Wricke, Sandro, Donkerbroek, Arend Johannes, Grimm, Daniel, Rathje, Tim
Year of Publication 03.10.2023
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Year of Publication 03.10.2023
Patent
IMAGE SENSOR FOR IMMERSION LITHOGRAPHY
GRIMM, Daniel, WRICKE, Sandro, BECKERS, Johan Franciscus Maria, RATHJE, Tim, BRAKHAGE, Peter, TILKE, Martin, BANERJEE, Nirupam, DONKERBROEK, Arend Johannes
Year of Publication 26.05.2022
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Year of Publication 26.05.2022
Patent
IMAGE SENSOR FOR IMMERSION LITHOGRAPHY
WRICKE, Sandro, GRIMM, Daniel, RATHJE, Tim, BECKERS, Johan, Franciscus, Maria, BRAKHAGE, Peter, TILKE, Martin, BANERJEE, Nirupam, DONKERBROEK, Arend, Johannes
Year of Publication 23.02.2022
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Year of Publication 23.02.2022
Patent
IMAGE SENSOR FOR IMMERSION LITHOGRAPHY
WRICKE, Sandro, GRIMM, Daniel, RATHJE, Tim, BECKERS, Johan, BRAKHAGE, Peter, DONKERBROEK, Arend, TILKE, Martin, BANERJEE, Nirupam
Year of Publication 22.10.2020
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Year of Publication 22.10.2020
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IMAGE SENSOR FOR IMMERSION LITHOGRAPHY
RATHJE TIM, WRICKE SANDRO, GRIMM DANIEL, BANERJEE NIRUPAM, BRAKHAGE PETER, DONKERBROEK AREND, BECKERS JOHAN, TILKE MARTIN
Year of Publication 30.11.2021
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Year of Publication 30.11.2021
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