THREE OR MORE STATES FOR ACHIEVING HIGH ASPECT RATIO DIELECTRIC ETCH
YANAGAWA TAKUMI, BRADFORD J LYNDAKER, ALEXEI MARAKHTANOV, FELIX LEIB KOZAKEVICH, NIKHIL DOLE, RANADEEP BHOWMICK, HUDSON ERIC, JOHN HOLLAND
Year of Publication 21.05.2024
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Year of Publication 21.05.2024
Patent