Cooling cavity and semiconductor processing device
ZHANG HENAN, XU BAOGANG, DONG BOYU, WANG JUN, LIU SHAOHUI, WU XUEWEI, ZHANG JUN, GUO BINGLIANG
Year of Publication 24.05.2017
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Year of Publication 24.05.2017
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Tray applied to thin-film deposition device
DONG BOYU, SUN LUYANG, CUI YAXIN, WU SHUBO, GUO BINGLIANG, ZHAO CHENGUANG, MA YINGGONG, LIU YUJIE, WU XUEWEI, ZHAI HONGTAO, XU WENXUE, ZHANG LU, ZHEN ZIYANG, SONG LINGYAN, YANG JIAN, YANG YILONG, LI XINYING
Year of Publication 08.05.2020
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Year of Publication 08.05.2020
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HEATING DEVICE AND HEATING CHAMBER
ZHANG, Jun, XU, Baogang, WU, Xuewei, GUO, Bingliang, ZHANG, Henan, ZHANG, Wen, LIU, Shaohui, DONG, Boyu
Year of Publication 13.04.2017
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Year of Publication 13.04.2017
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Control method and system for wafer of PVD sputtering device to return to disk according to specified path
ZHANG JIAHAO, DONG BOYU, LI LI, CHEN YUJING, WU SHUBO, GUO BINGLIANG, ZHAO CHENGUANG, MA YINGGONG, LIU YUJIE, WU XUEWEI, ZHANG LU, YANG YANG, SONG LINGYAN, YANG YILONG, LI XINYING
Year of Publication 31.03.2020
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Year of Publication 31.03.2020
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Cooling device, control method thereof and semiconductor processing equipment
ZHANG JIAHAO, DONG BOYU, LI LI, WU SHUBO, CHEN YUJING, GUO BINGLIANG, ZHAO CHENGUANG, MA YINGGONG, LIU YUJIE, WU XUEWEI, ZHANG LU, SONG LINGYAN, YANG YILONG, LI XINYING
Year of Publication 24.03.2020
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Year of Publication 24.03.2020
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Magnetron sputtering method and device
ZHANG HENAN, DONG BOYU, XU BAOGANG, WANG JUN, LIU SHAOHUI, WU XUEWEI, MA HUAICHAO, ZHANG JUN, CUI YAXIN, YAO YANSHUANG, GUO BINGLIANG
Year of Publication 23.02.2018
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Year of Publication 23.02.2018
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Temperature control method and device, and semiconductor processing apparatus
ZHANG HENAN, DONG BOYU, XU BAOGANG, WANG JUN, LIU SHAOHUI, WU XUEWEI, MA HUAICHAO, ZHANG JUN, GUO BINGLIANG
Year of Publication 19.01.2018
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Year of Publication 19.01.2018
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In situ film thickness monitoring method and device
ZHANG HENAN, DONG BOYU, XU BAOGANG, WU XUEWEI, MA HUAICHAO, ZHANG JUN, LIU FEIFEI, CUI YAXIN, GUO BINGLIANG, LI XINYING
Year of Publication 05.01.2018
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Year of Publication 05.01.2018
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CARRYING DEVICE AND PHYSICAL VAPOR DEPOSITION APPARATUS
GENG, Yujie, WANG, Jun, ZHAO, Kangning, DONG, Boyu, ZHANG, Jun, CUI, Yaxin, XU, Baogang, WU, Xuewei, WANG, Tong, GUO, Bingliang, ZHANG, Henan, MA, Huaichao, LIU, Shaohui, WANG, Qingxuan
Year of Publication 03.01.2019
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Year of Publication 03.01.2019
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DEPOSITION DEVICE AND PHYSICAL VAPOUR DEPOSITION CHAMBER
ZHANG, Jun, ZHAO, Jinrong, XU, Baogang, WU, Xuewei, WANG, Tong, WANG, Jun, GUO, Bingliang, ZHANG, Henan, LIU, Shaohui, DONG, Boyu
Year of Publication 21.12.2017
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Year of Publication 21.12.2017
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Deposition equipment and physical vapor deposition chamber
ZHAO JINRONG, ZHANG HENAN, DONG BOYU, XU BAOGANG, WANG JUN, LIU SHAOHUI, WU XUEWEI, ZHANG JUN, WANG TONG, GUO BINGLIANG
Year of Publication 19.12.2017
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Year of Publication 19.12.2017
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Process equipment
ZHANG HENAN, DONG BOYU, ZHAO KANGNING, LIU SHAOHUI, MA HUAICHAO, WANG QINGXUAN, WANG TONG, LI LI, GUO BINGLIANG, GENG YUJIE, XU BAOGANG, WANG JUN, LI HENAN, WU XUEWEI
Year of Publication 02.11.2018
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Year of Publication 02.11.2018
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Cooling chamber, ALN buffer layer growth processing equipment and cooling treatment method
ZHANG JIAHAO, DONG BOYU, LI LI, WU SHUBO, CHEN YUJING, GUO BINGLIANG, ZHAO CHENGUANG, MA YINGGONG, LIU YUJIE, WU XUEWEI, ZHANG LU, SONG LINGYAN, YANG YILONG, LI XINYING
Year of Publication 02.08.2019
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Year of Publication 02.08.2019
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Manipulator
ZHANG HENAN, DONG BOYU, XU BAOGANG, LIU SHAOHUI, WU XUEWEI, MA HUAICHAO, ZHANG JUN, CUI YAXIN, GUO BINGLIANG
Year of Publication 24.05.2017
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Year of Publication 24.05.2017
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Base and physical vapor deposition device
ZHANG HENAN, DONG BOYU, LIU SHAOHUI, ZHAO KANGNING, MA HUAICHAO, ZHANG JUN, WANG QINGXUAN, WANG TONG, CUI YAXIN, GUO BINGLIANG, GENG YUJIE, XU BAOGANG, WANG JUN, WU XUEWEI
Year of Publication 06.03.2018
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Year of Publication 06.03.2018
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Base and physical vapor deposition device
ZHANG HENAN, DONG BOYU, LIU SHAOHUI, ZHAO KANGNING, MA HUAICHAO, ZHANG JUN, WANG QINGXUAN, WANG TONG, CUI YAXIN, GUO BINGLIANG, GENG YUJIE, XU BAOGANG, WANG JUN, WU XUEWEI
Year of Publication 03.10.2017
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Year of Publication 03.10.2017
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Cooling chamber and semiconductor processing equipment
ZHANG HENAN, DONG BOYU, LIU SHAOHUI, ZHAO KANGNING, MA HUAICHAO, ZHANG JUN, WANG QINGXUAN, WANG TONG, CUI YAXIN, GUO BINGLIANG, GENG YUJIE, XU BAOGANG, WANG JUN, WU XUEWEI
Year of Publication 22.09.2017
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Year of Publication 22.09.2017
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Polishing apparatus and polishing method
HIROYUKI SHINOZAKI, MITSURU MIYAZAKI, KENICHI KOBAYASHI, TERUAKI HOMBO, BOYU DONG, AKIRA IMAMURA
Year of Publication 14.05.2014
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Year of Publication 14.05.2014
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Substrate processing apparatus
HIROYUKI SHINOZAKI, MITSURU MIYAZAKI, KENICHI KOBAYASHI, TERUAKI HOMBO, BOYU DONG, AKIRA IMAMURA
Year of Publication 02.04.2014
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Year of Publication 02.04.2014
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Elevating system and semiconductor processing equipment
ZHANG HENAN, DONG BOYU, LIU SHAOHUI, ZHAO KANGNING, MA HUAICHAO, ZHANG JUN, WANG QINGXUAN, WANG TONG, CUI YAXIN, GUO BINGLIANG, GENG YUJIE, XU BAOGANG, WANG JUN, WU XUEWEI
Year of Publication 08.02.2017
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Year of Publication 08.02.2017
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