CHEMICAL VAPOR DEPOSITION OF TITANIUM ON A WAFER COMPRISING AN IN-SITU PRECLEANING STEP
WU, LI, VASUDEV, ANAND, JENNINGS, PATRICIA, WU, FREDERICK, C, CHANG, MEI, BOYLE, BRIAN, P, BUCKLEY, LAWRENCE, D., JR, SRINIVAS, RAMANUJAPURAM, A, HIZUME, SHUNICHI
Year of Publication 16.09.1999
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Year of Publication 16.09.1999
Patent
CHEMICAL VAPOR DEPOSITION OF TITANIUM ON A WAFER COMPRISING AN IN-SITU PRECLEANING STEP
WU, LI, VASUDEV, ANAND, JENNINGS, PATRICIA, WU, FREDERICK, C, CHANG, MEI, BOYLE, BRIAN, P, BUCKLEY, LAWRENCE, D., JR, SRINIVAS, RAMANUJAPURAM, A, HIZUME, SHUNICHI
Year of Publication 10.06.1999
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Year of Publication 10.06.1999
Patent