EUV laser produced plasma source development
Farrar, Nigel R., Brandt, David C., Fomenkov, Igor V., Ershov, Alex I., Bowering, Norbert R., Partlo, William N., Myers, David W., Bykanov, Alexander N., Vaschenko, Georgiy O., Khodykin, Oleh V., Hoffman, Jerzy R., Chrobak, Christopher P.
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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Journal Article
Conference Proceeding
EUV LIGHT SOURCE COMPONENTS AND METHODS FOR PRODUCING, USING AND REPAIRING THE SAME
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Year of Publication 27.07.2015
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Year of Publication 27.07.2015
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TARGET MATERIAL SUPPLY FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
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Year of Publication 30.06.2015
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Year of Publication 30.06.2015
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HARSH ENVIRONMENT OPTICAL ELEMENT PROTECTION
ERSHOV ALEXANDER I, BOWERING NORBERT R, LA FONTAINE BRUNO, DE DEA SILVIA
Year of Publication 10.06.2015
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Year of Publication 10.06.2015
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LASER PRODUCED PLASMA EUV LIGHT SOURCE
FOMENKOV IGOR V, ERSHOV ALEXANDER I, PARTLO WILLIAM N, BOWERING NORBERT R, KHODYKIN OLEH V, BYKANOV ALEXANDER N, BRANDT DAVID C
Year of Publication 29.11.2016
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Year of Publication 29.11.2016
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LASER PRODUCED PLASMA EUV LIGHT SOURCE
FOMENKOV IGOR V, ERSHOV ALEXANDER I, PARTLO WILLIAM N, BOWERING NORBERT R, KHODYKIN OLEH V, BYKANOV ALEXANDER N, BRANDT DAVID C
Year of Publication 08.05.2015
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Year of Publication 08.05.2015
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DRIVE LASER FOR EUV LIGHT SOURCE
ERSHOV ALEXANDER I, BOWERING NORBERT R, HOFFMAN JERZY R, BYKANOV ALEXANDER N
Year of Publication 15.10.2010
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Year of Publication 15.10.2010
Patent
COLLECTOR FOR EUV LIGHT SOURCE
FOMENKOV IGOR V, PARTLO WILLIAM N, ERSHOV ALEXANDER I, BOWERING NORBERT, PAN XIAOJIANG J, ALGOTS J. MARTIN, BLUMENSTOCK GERRY M
Year of Publication 11.03.2011
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Year of Publication 11.03.2011
Patent