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Year of Publication 04.06.2020
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Year of Publication 04.06.2020
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기판 홀더 및 기판 홀더의 제조 방법
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Year of Publication 11.03.2019
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Year of Publication 11.03.2019
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Year of Publication 19.04.2023
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Year of Publication 19.04.2023
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Substrate holder and a method of manufacturing a device
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Year of Publication 10.08.2021
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Year of Publication 10.08.2021
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SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A DEVICE
ACHANTA, Satish, BOUWKNEGT, Jeroen, POIESZ, Thomas, SOETHOUDT, Abraham Alexander
Year of Publication 17.09.2020
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Year of Publication 17.09.2020
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A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A DEVICE
ACHANTA, Satish, BOUWKNEGT, Jeroen, POIESZ, Thomas, SOETHOUDT, Abraham Alexander
Year of Publication 16.09.2020
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Year of Publication 16.09.2020
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A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER
ANTONOV, Pavlo, TEN KATE, Nicolaas, AKBAS, Mehmet Ali, ACHANTA, Satish, PACITTI, Evelyn Wallis, TIRRI, Bruce, BOUWKNEGT, Jeroen, FRENKEN, Joost Wilhelmus Maria, POIESZ, Thomas, VERHOEVEN, Jan
Year of Publication 10.01.2024
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Year of Publication 10.01.2024
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A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A DEVICE
ACHANTA, Satish, SOETHOUDT, Abraham, BOUWKNEGT, Jeroen, POIESZ, Thomas
Year of Publication 16.05.2019
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Year of Publication 16.05.2019
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Substrate holder and a method of manufacturing a substrate holder
Achanta, Satish, Antonov, Pavlo, Verhoeven, Jan, Poiesz, Thomas, Akbas, Mehmet Ali, Bouwknegt, Jeroen, Pacitti, Evelyn Wallis, Frenken, Joost Wilhelmus Maria, Tirri, Bruce, Ten Kate, Nicolaas
Year of Publication 21.07.2020
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Year of Publication 21.07.2020
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A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER
ANTONOV, Pavlo, TEN KATE, Nicolaas, AKBAS, Mehmet Ali, ACHANTA, Satish, PACITTI, Evelyn Wallis, TIRRI, Bruce, BOUWKNEGT, Jeroen, FRENKEN, Joost Wilhelmus Maria, POIESZ, Thomas, VERHOEVEN, Jan
Year of Publication 31.10.2019
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Year of Publication 31.10.2019
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A substrate holder and a method of manufacturing a substrate holder
SOETHOUDT, ABRAHAM ALEXANDER, POIESZ, THOMAS, BOUWKNEGT, JEROEN, ACHANTA, SATISH
Year of Publication 11.11.2020
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Year of Publication 11.11.2020
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A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER
ANTONOV, Pavlo, TEN KATE, Nicolaas, AKBAS, Mehmet Ali, ACHANTA, Satish, PACITTI, Evelyn Wallis, TIRRI, Bruce, BOUWKNEGT, Jeroen, FRENKEN, Joost Wilhelmus Maria, POIESZ, Thomas, VERHOEVEN, Jan
Year of Publication 15.05.2019
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Year of Publication 15.05.2019
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SYSTEM, DEVICE AND METHOD FOR RECONDITIONING A SUBSTRATE SUPPORT
ANTONOV, Pavlo, BALTIS, Coen Hubertus Matheus, FARLE, Ann-Sophie m, SCHOLTEN, Bert Dirk, VAN DE VIJVER, Yuri Johannes Gabriel, ACHANTA, Satish, PALERMO, Ralph Nicholas, BOUWKNEGT, Jeroen, VAN DE WINKEL, Jimmy Matheus Wilhelmus, MASON, Christopher John, POIESZ, Thomas, AKCHURIN, Aydar
Year of Publication 25.02.2021
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Year of Publication 25.02.2021
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SYSTEM, DEVICE AND METHOD FOR RECONDITIONING A SUBSTRATE SUPPORT
ANTONOV, Pavlo, SCHOLTEN, Bert, FARLE, Ann-Sophie M, MASON, Christopher, ACHANTA, Satish, VAN DE VIJVER, Yuri, PALERMO, Ralph, VAN DE WINKEL, Jimmy, BOUWKNEGT, Jeroen, BALTIS, Coen, AKCHURIN, Aydar
Year of Publication 15.08.2019
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Year of Publication 15.08.2019
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A substrate holder and a method of manufacturing a substrate holder
SOETHOUDT, ABRAHAM ALEXANDER, POIESZ, THOMAS, BOUWKNEGT, JEROEN, ACHANTA, SATISH
Year of Publication 16.06.2019
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Year of Publication 16.06.2019
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A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER
ANTONOV, Pavlo, AKBAS, Mehmet, Ali, TEN KATE, Nicolaas, ACHANTA, Satish, FRENKEN, Joost, Wilhelmus, Maria, PACITTI, Evelyn, Wallis, TIRRI, Bruce, BOUWKNEGT, Jeroen, POIESZ, Thomas, VERHOEVEN, Jan
Year of Publication 11.01.2018
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Year of Publication 11.01.2018
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A Substrate Holder and a Method of Manufacturing a Substrate Holder
THOMAS POIESZ, JEROEN BOUWKNEGT, NICOLAAS TEN KATE, SATISH ACHANTA, EVELYN WALLIS PACITTI, PAVLO ANTONOV, JAN VERHOEVEN, JOOST WILHELMUS MARIA FRENKEN, BRUCE TIRRI, MEHMET ALI AKBAS
Year of Publication 11.01.2018
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Year of Publication 11.01.2018
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A substrate holder and a method of manufacturing a substrate holder
TIRRI, BRUCE, POIESZ, THOMAS, AKBAS, MEHMET ALI, VERHOEVEN, JAN, BOUWKNEGT, JEROEN, PACITTI, EVELYN WALLIS, FRENKEN, JOOST WILHELMUS MARIA, ACHANTA, SATISH, ANTONOV, PAVLO, TEN KATE, NICOLAAS
Year of Publication 01.11.2022
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Year of Publication 01.11.2022
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System, Device and Method for Reconditioning a Substrate Support
JEROEN BOUWKNEGT, THOMAS POIESZ, JIMMY MATHEUS WILHELMUS VAN DE WINKEL, CHRISTOPHER JOHN MASON, SATISH ACHANTA, ANN-SOPHIE M. FARLE, COEN HUBERTUS MATHEUS BALTIS, PAVLO ANTONOV, YURI JOHANNES GABRIËL VAN DE VIJVER, AYDAR AKCHURIN, RALPH NICHOLAS PALERMO, BERT DIRK SCHOLTEN
Year of Publication 18.02.2019
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Year of Publication 18.02.2019
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