Fabrication of piezoelectric Al 0.3Ga 0.7As microstructures
Kumar, Parshant, Li, Lihua, Calhoun, Lynn, Boudreaux, Paul, DeVoe, Don
Published in Sensors and actuators. A. Physical. (2004)
Published in Sensors and actuators. A. Physical. (2004)
Get full text
Journal Article
Fabrication of piezoelectric Al0.3Ga0.7As microstructures
Kumar, Parshant, Li, Lihua, Calhoun, Lynn, Boudreaux, Paul, DeVoe, Don
Published in Sensors and actuators. A. Physical. (15.09.2004)
Published in Sensors and actuators. A. Physical. (15.09.2004)
Get full text
Journal Article