Deposition and patterning of electrodes on the vertical sidewalls of deep trenches
Bonnin, L, Piot, A, Isac, N, Bosseboeuf, A
Published in Journal of micromechanics and microengineering (01.10.2020)
Published in Journal of micromechanics and microengineering (01.10.2020)
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Journal Article
Piezoelectric micromachined ultrasonic transducers based on PZT thin films
Muralt, P., Ledermann, N., Paborowski, J., Barzegar, A., Gentil, S., Belgacem, B., Petitgrand, S., Bosseboeuf, A., Setter, N.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.12.2005)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.12.2005)
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Journal Article
Comparative study of Au/Ti, Au/V and Au/Zr films oxygen gettering ability
Wu, M., Moulin, J., Coste, P., Perrot, S., Perrossier, J.-L., Renard, C., Bosseboeuf, A.
Published in Thin solid films (01.10.2016)
Published in Thin solid films (01.10.2016)
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Journal Article
In situ electrical characterization of YxTiy getter thin films during thermal activation
Bessouet, C, Lemettre, S, Bosseboeuf, A, Coste, P, Renard, Ch, Lecoq, H, Sauvage, T, Moulin, J
Published in Journal of physics. Conference series (03.10.2019)
Published in Journal of physics. Conference series (03.10.2019)
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Journal Article
Silicon full wafer bonding with atomic layer deposited titanium dioxide and aluminum oxide intermediate films
Puurunen, R.L., Suni, T., Ylivaara, O.M.E., Kondo, H., Ammar, M., Ishida, T., Fujita, H., Bosseboeuf, A., Zaima, S., Kattelus, H.
Published in Sensors and actuators. A. Physical. (01.12.2012)
Published in Sensors and actuators. A. Physical. (01.12.2012)
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Journal Article
Large area and broadband semi-reflective Bragg mirror membrane manufactured by PECVD
Bertin, H, Bosseboeuf, A, Coste, P, Péalat, M, Roux, N
Published in Journal of micromechanics and microengineering (01.07.2013)
Published in Journal of micromechanics and microengineering (01.07.2013)
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Journal Article
Conference Proceeding
MEMS packaging process by film transfer using an anti-adhesive layer
Brault, Sebastien, Garel, O., Schelcher, G., Isac, N., Parrain, F., Bosseboeuf, A., Verjus, F., Desgeorges, M., Dufour-Gergam, E.
Published in Microsystem technologies (01.07.2010)
Published in Microsystem technologies (01.07.2010)
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Journal Article
Conference Proceeding
Gold metallizations for eutectic bonding of silicon wafers
LANI, S, BOSSEBOEUF, A, BELIER, B, CLERC, C, GOUSSET, C, AUBERT, J
Published in Microsystem technologies (01.09.2006)
Published in Microsystem technologies (01.09.2006)
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Conference Proceeding
Journal Article
Fabrication of free-standing porous silicon microstructures
Garel, O, Breluzeau, C, Dufour-Gergam, E, Bosseboeuf, A, Belier, B, Mathet, V, Verjus, F
Published in Journal of micromechanics and microengineering (01.07.2007)
Published in Journal of micromechanics and microengineering (01.07.2007)
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Journal Article
Conference Proceeding
Vacuum measurement in wafer level encapsulations by interference microscopy
BOSSEBOEUF, A, GRANDCHAMP, J. P, BRELUZEAU, C, LANI, S, PALOMO, J, BOUVILLE, D
Published in Microsystem technologies (01.09.2006)
Published in Microsystem technologies (01.09.2006)
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Conference Proceeding
Journal Article
Improvement of a classical electrodeposition process for electrostatic variable-capacitance, side-drive micromotor fabrication
Surbled, P, Dufour-Gergam, E, Bosseboeuf, A, Gilles, J-P, Grandchamp, J-P
Published in Journal of micromechanics and microengineering (01.03.1996)
Published in Journal of micromechanics and microengineering (01.03.1996)
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Journal Article
Conference Proceeding
Towards high fidelity high efficiency MEMS microspeakers
Shahosseini, I, Lefeuvre, E, Woytasik, M, Moulin, J, Leroux, X, Edmond, S, Dufour-Gergam, E, Bosseboeuf, A, Lemarquand, G, Lemarquand, V
Published in 2010 IEEE Sensors (01.11.2010)
Published in 2010 IEEE Sensors (01.11.2010)
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Conference Proceeding
PZT polarization voltage effects on off-centered PZT patch actuating silicon membrane
Guirardel, M., Bergaud, C., Cattan, E., Remiens, D., Belier, B., Petitgrand, S., Bosseboeuf, A.
Published in Sensors and actuators. A. Physical. (01.02.2004)
Published in Sensors and actuators. A. Physical. (01.02.2004)
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Journal Article
Fabrication of UV-transparent SixOyNz membranes with a low frequency PECVD reactor
DANAIE, K, BOSSEBOEUF, A, CLERC, C, GOUSSET, C, JULIE, G
Published in Sensors and actuators. A, Physical (30.04.2002)
Published in Sensors and actuators. A, Physical (30.04.2002)
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Conference Proceeding
Journal Article
Permalloy electroplating through photoresist molds
Quemper, Jean-Marie, Nicolas, S., Gilles, J.P., Grandchamp, J.P., Bosseboeuf, A., Bourouina, T., Dufour-Gergam, E.
Published in Sensors and actuators. A, Physical (20.04.1999)
Published in Sensors and actuators. A, Physical (20.04.1999)
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Journal Article
Conference Proceeding