Zero defect manufacturing as a challenge for advanced failure analysis
Gabler, U., Osterreicher, I., Bosk, P., Nowak, C.
Published in 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.06.2007)
Published in 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.06.2007)
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Conference Proceeding
Degradation mechanisms of SrBi 2 Ta 2 O 9 ferroelectric thin film capacitors during forming gas annealing
Hartner, Walter, Bosk, Peter, Schindler, Günther, Schroeder, Herbert, Waser, Rainer, Dehm, Christine, Mazuré, Carlos
Published in Integrated ferroelectrics (01.11.2000)
Published in Integrated ferroelectrics (01.11.2000)
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Journal Article
Integration of H 2 barriers for ferroelectric memories based on SrBi 2 Ta 2 O 9 (SBT)
Hartner, Walter, Schindler, Günther, Bosk, Peter, Gabric, Zonimir, Kastner, Markus, Beitel, Gerhard, Mikolajick, Thomas, Dehm, Christine, Mazuré, Carlos
Published in Integrated ferroelectrics (01.11.2000)
Published in Integrated ferroelectrics (01.11.2000)
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Journal Article
Integration of H2 barriers for ferroelectric memories based on SrBi2Ta2O9 (SBT)
Hartner, Walter, Schindler, Günther, Bosk, Peter, Gabric, Zonimir, Kastner, Markus, Beitel, Gerhard, Mikolajick, Thomas, Dehm, Christine, Mazuré, Carlos
Published in Integrated ferroelectrics (01.11.2000)
Published in Integrated ferroelectrics (01.11.2000)
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Journal Article