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"BORODOVSKY; YAN"
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전자 빔 노광 시스템을 위한 미세 정렬 시스템
by
BORODOVSKY YAN
A
Year of Publication
26.12.2017
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CORNER ROUNDING CORRECTION FOR ELECTRON BEAM EBEAM DIRECT WRITE SYSTEM
by
BORODOVSKY YAN
A
Year of Publication
19.04.2017
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CROSS SCAN PROXIMITY CORRECTION WITH EBEAM UNIVERSAL CUTTER
by
BORODOVSKY YAN
A
Year of Publication
18.04.2017
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EBEAM STAGGERED BEAM APERTURE ARRAY
by
NELSON DONALD W
,
BORODOVSKY YAN
A
,
PHILLIPS MARK C
Year of Publication
15.02.2017
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E 3 EBEAM THREE BEAM APERTURE ARRAY
by
NELSON DONALD W
,
BORODOVSKY YAN
A
,
PHILLIPS MARK C
Year of Publication
15.02.2017
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EBEAM NON-UNIVERSAL CUTTER
by
NELSON DONALD W
,
BORODOVSKY YAN
A
,
PHILLIPS MARK C
Year of Publication
15.02.2017
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e EBEAM ALIGN ON THE FLY
by
NELSON DONALD W
,
BORODOVSKY YAN
A
,
PHILLIPS MARK C
Year of Publication
15.02.2017
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UNIDIRECTIONAL METAL ON LAYER WITH EBEAM
by
NELSON DONALD W
,
BORODOVSKY YAN
A
,
PHILLIPS MARK C
Year of Publication
10.02.2017
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EBEAM UNIVERSAL CUTTER
by
NELSON DONALD W
,
BORODOVSKY YAN
A
,
PHILLIPS MARK C
Year of Publication
10.02.2017
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EBDW UNDERLYING ABSORBING OR CONDUCTING LAYER FOR EBEAM DIRECT WRITEEBDW LITHOGRAPHY
by
TANDON SHAKUL
,
BORODOVSKY YAN
A
,
WALLACE CHARLES H
,
NYHUS PAUL A
Year of Publication
19.09.2017
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DATA COMPRESSION FOR EBEAM THROUGHPUT
by
NELSON DONALD W
,
BORODOVSKY YAN
A
,
PHILLIPS MARK C
,
BIGWOOD ROBERT M
Year of Publication
10.02.2017
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Cross scan proximity correction with ebeam universal cutter
by
Borodovsky
,
Yan
A
Year of Publication
18.08.2020
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CROSS SCAN PROXIMITY CORRECTION WITH EBEAM UNIVERSAL CUTTER
by
BORODOVSKY
,
YAN
A
Year of Publication
25.04.2019
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FINE ALIGNMENT SYSTEM FOR ELECTRON BEAM EXPOSURE SYSTEM
by
BORODOVSKY
,
Yan
A
Year of Publication
03.04.2019
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Fine alignment system for electron beam exposure system
by
Borodovsky
,
Yan
A
Year of Publication
19.03.2019
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Cross scan proximity correction with ebeam universal cutter
by
Borodovsky
,
Yan
A
Year of Publication
29.01.2019
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CORNER ROUNDING CORRECTION FOR ELECTRON BEAM (EBEAM) DIRECT WRITE SYSTEM
by
BORODOVSKY
,
Yan
A
Year of Publication
18.07.2018
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CROSS SCAN PROXIMITY CORRECTION WITH EBEAM UNIVERSAL CUTTER
by
BORODOVSKY
,
Yan
A
Year of Publication
18.04.2018
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FINE ALIGNMENT SYSTEM FOR ELECTRON BEAM EXPOSURE SYSTEM
by
BORODOVSKY
,
Yan
A
Year of Publication
28.02.2018
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Corner rounding correction for electron beam (Ebeam) direct write system
by
Borodovsky Yan
A
Year of Publication
20.02.2018
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