Showing
1 - 20
results of
129
for search '
"BORODOVSKY, Yan A"
'
Skip to content
Portal K.UTB
Čeština
Login
TBU Catalog
e-resources
E-THESES
All Fields
Title
Author
Subject
Find
Advanced Search
Search Results - "BORODOVSKY, Yan A"
Showing
1 - 20
results of
129
for search '
"BORODOVSKY, Yan A"
'
, query time: 0.82s
Refine Results
Sort
Relevance
Date Descending
Date Ascending
1
Loading…
전자 빔 노광 시스템을 위한 미세 정렬 시스템
by
BORODOVSKY YAN A
Year of Publication
26.12.2017
Get full text
Patent
Save to List
Saved in:
2
Loading…
CORNER ROUNDING CORRECTION FOR ELECTRON BEAM EBEAM DIRECT WRITE SYSTEM
by
BORODOVSKY YAN A
Year of Publication
19.04.2017
Get full text
Patent
Save to List
Saved in:
3
Loading…
CROSS SCAN PROXIMITY CORRECTION WITH EBEAM UNIVERSAL CUTTER
by
BORODOVSKY YAN A
Year of Publication
18.04.2017
Get full text
Patent
Save to List
Saved in:
4
Loading…
EBEAM STAGGERED BEAM APERTURE ARRAY
by
NELSON DONALD W
,
BORODOVSKY YAN A
,
PHILLIPS MARK C
Year of Publication
15.02.2017
Get full text
Patent
Save to List
Saved in:
5
Loading…
E 3 EBEAM THREE BEAM APERTURE ARRAY
by
NELSON DONALD W
,
BORODOVSKY YAN A
,
PHILLIPS MARK C
Year of Publication
15.02.2017
Get full text
Patent
Save to List
Saved in:
6
Loading…
EBEAM NON-UNIVERSAL CUTTER
by
NELSON DONALD W
,
BORODOVSKY YAN A
,
PHILLIPS MARK C
Year of Publication
15.02.2017
Get full text
Patent
Save to List
Saved in:
7
Loading…
e EBEAM ALIGN ON THE FLY
by
NELSON DONALD W
,
BORODOVSKY YAN A
,
PHILLIPS MARK C
Year of Publication
15.02.2017
Get full text
Patent
Save to List
Saved in:
8
Loading…
UNIDIRECTIONAL METAL ON LAYER WITH EBEAM
by
NELSON DONALD W
,
BORODOVSKY YAN A
,
PHILLIPS MARK C
Year of Publication
10.02.2017
Get full text
Patent
Save to List
Saved in:
9
Loading…
EBEAM UNIVERSAL CUTTER
by
NELSON DONALD W
,
BORODOVSKY YAN A
,
PHILLIPS MARK C
Year of Publication
10.02.2017
Get full text
Patent
Save to List
Saved in:
10
Loading…
EBDW UNDERLYING ABSORBING OR CONDUCTING LAYER FOR EBEAM DIRECT WRITEEBDW LITHOGRAPHY
by
TANDON SHAKUL
,
BORODOVSKY YAN A
,
WALLACE CHARLES H
,
NYHUS PAUL A
Year of Publication
19.09.2017
Get full text
Patent
Save to List
Saved in:
11
Loading…
DATA COMPRESSION FOR EBEAM THROUGHPUT
by
NELSON DONALD W
,
BORODOVSKY YAN A
,
PHILLIPS MARK C
,
BIGWOOD ROBERT M
Year of Publication
10.02.2017
Get full text
Patent
Save to List
Saved in:
12
Loading…
Cross scan proximity correction with ebeam universal cutter
by
Borodovsky
,
Yan A
Year of Publication
18.08.2020
Get full text
Patent
Save to List
Saved in:
13
Loading…
CROSS SCAN PROXIMITY CORRECTION WITH EBEAM UNIVERSAL CUTTER
by
BORODOVSKY
,
YAN A
Year of Publication
25.04.2019
Get full text
Patent
Save to List
Saved in:
14
Loading…
FINE ALIGNMENT SYSTEM FOR ELECTRON BEAM EXPOSURE SYSTEM
by
BORODOVSKY
,
Yan A
Year of Publication
03.04.2019
Get full text
Patent
Save to List
Saved in:
15
Loading…
Fine alignment system for electron beam exposure system
by
Borodovsky
,
Yan A
Year of Publication
19.03.2019
Get full text
Patent
Save to List
Saved in:
16
Loading…
Cross scan proximity correction with ebeam universal cutter
by
Borodovsky
,
Yan A
Year of Publication
29.01.2019
Get full text
Patent
Save to List
Saved in:
17
Loading…
CORNER ROUNDING CORRECTION FOR ELECTRON BEAM (EBEAM) DIRECT WRITE SYSTEM
by
BORODOVSKY
,
Yan A
Year of Publication
18.07.2018
Get full text
Patent
Save to List
Saved in:
18
Loading…
CROSS SCAN PROXIMITY CORRECTION WITH EBEAM UNIVERSAL CUTTER
by
BORODOVSKY
,
Yan A
Year of Publication
18.04.2018
Get full text
Patent
Save to List
Saved in:
19
Loading…
FINE ALIGNMENT SYSTEM FOR ELECTRON BEAM EXPOSURE SYSTEM
by
BORODOVSKY
,
Yan A
Year of Publication
28.02.2018
Get full text
Patent
Save to List
Saved in:
20
Loading…
Corner rounding correction for electron beam (Ebeam) direct write system
by
Borodovsky Yan A
Year of Publication
20.02.2018
Get full text
Patent
Save to List
Saved in:
1
2
3
4
5
6
7
Next
[7]
RSS Feed
Email Search
Save Search
Search History
Back
Refine Results
Page will reload when a filter is selected or excluded.
Limit to articles from scholarly journals
Limit to articles with full text available
Limit to Open Access content
Exclude newspaper articles
Include articles at other libraries
Expand results using synonyms
Format
Patent
129 results
129
Subject Area
chemistry
129 results
129
medicine
129 results
129
sciences
129 results
129
physics
56 results
56
Topic
basic electric elements
119 results
119
electricity
119 results
119
electric solid state devices not otherwise provided for
102 results
102
semiconductor devices
102 results
102
electric discharge tubes or discharge lamps
58 results
58
physics
56 results
56
See more
Language
English
128 results
128
Chinese
44 results
44
French
36 results
36
German
25 results
25
Korean
11 results
11
Year of Publication
From:
To:
Database
esp@cenet
129 results
129