On the effects of hydrogenation of thin film polycrystalline silicon: A key factor to improve heterojunction solar cells
Qiu, Yu, Kunz, Oliver, Fejfar, Antonin, Ledinský, Martin, Teik Chan, Boon, Gordon, Ivan, Van Gestel, Dries, Venkatachalm, Srisaran, Egan, Renate
Published in Solar energy materials and solar cells (01.03.2014)
Published in Solar energy materials and solar cells (01.03.2014)
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Journal Article
Hexagonal Hole Array Patterning for Memory Applications
Singh, Arjun, Chan, Boon Teik, Gronheid, Roel
Published in Journal of Photopolymer Science and Technology (01.01.2015)
Published in Journal of Photopolymer Science and Technology (01.01.2015)
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Journal Article
A Thermally Stable and High-Performance 90-nm Al2O3\Cu-Based 1T1R CBRAM Cell
BELMONTE, Attilio, WOOSIK KIM, BOON TEIK CHAN, HEYLEN, Nancy, FANTINI, Andrea, HOUSSA, Michel, JURCZAK, Malgorzata, GOUX, Ludovic
Published in IEEE transactions on electron devices (01.11.2013)
Published in IEEE transactions on electron devices (01.11.2013)
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Journal Article
Readying Directed Self-Assembly for Patterning in Semi-Conductor Manufacturing
Gronheid, Roel, Delgadillo, Paulina Rincon, Singh, Arjun, Younkin, Todd R., Suyan, Safak, Chan, Boon Teik, Look, Lieve Van, Bekaert, Joost, Pollentir, Ivan, Nealey, Paul F.
Published in Journal of Photopolymer Science and Technology (01.01.2013)
Published in Journal of Photopolymer Science and Technology (01.01.2013)
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Journal Article
28 nm pitch of line/space pattern transfer into silicon substrates with chemo-epitaxy Directed Self-Assembly (DSA) process flow
BOON TEIK CHAN, TAHARA, Shigeru, PARNELL, Doni, DELGADILLO, Paulina A. Rincon, GRONHEID, Roel, DE MARNEFFE, Jean-François, KAIDONG XU, NISHIMURA, Eiichi, BOULLART, Werner
Published in Microelectronic engineering (01.07.2014)
Published in Microelectronic engineering (01.07.2014)
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Conference Proceeding
Journal Article
A Thermally Stable and High-Performance 90-nm \backslash-Based 1T1R CBRAM Cell
Belmonte, Attilio, Woosik Kim, Boon Teik Chan, Heylen, Nancy, Fantini, Andrea, Houssa, Michel, Jurczak, Malgorzata, Goux, Ludovic
Published in IEEE transactions on electron devices (01.11.2013)
Published in IEEE transactions on electron devices (01.11.2013)
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Journal Article
Study of SF6/N2O Microwave Plasma for Surface Texturing of Multicrystalline (${<}150$ μm) Solar Substrates
Chan, Boon Teik, Kunnen, Eddy, Uhlig, Matthias, Marneffe, Jean-Francois de, Xu, Kaidong, Boullart, Werner, Rau, Bernd, Poortmans, Jef
Published in Jpn J Appl Phys (01.10.2012)
Published in Jpn J Appl Phys (01.10.2012)
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Journal Article
Insight into Selective Surface Reactions of Dimethylamino-trimethylsilane for Area-Selective Deposition of Metal, Nitride, and Oxide
Soethoudt, Job, Tomczak, Yoann, Meynaerts, Ben, Chan, Boon Teik, Delabie, Annelies
Published in Journal of physical chemistry. C (02.04.2020)
Published in Journal of physical chemistry. C (02.04.2020)
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Journal Article
CFET SRAM DTCO, Interconnect Guideline, and Benchmark for CMOS Scaling
Liu, Hsiao-Hsuan, Salahuddin, Shairfe M., Chan, Boon Teik, Schuddinck, Pieter, Xiang, Yang, Hellings, Geert, Weckx, Pieter, Ryckaert, Julien, Catthoor, Francky
Published in IEEE transactions on electron devices (01.03.2023)
Published in IEEE transactions on electron devices (01.03.2023)
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Journal Article
CFET SRAM With Double-Sided Interconnect Design and DTCO Benchmark
Liu, Hsiao-Hsuan, Schuddinck, Pieter, Pei, Zhenlin, Verschueren, Lynn, Mertens, Hans, Salahuddin, Shairfe M., Hiblot, Gaspard, Xiang, Yang, Chan, Boon Teik, Subramanian, Sujith, Weckx, Pieter, Hellings, Geert, Bardon, Marie Garcia, Ryckaert, Julien, Pan, Chenyun, Catthoor, Francky
Published in IEEE transactions on electron devices (01.10.2023)
Published in IEEE transactions on electron devices (01.10.2023)
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Journal Article
Conversion of a Patterned Organic Resist into a High Performance Inorganic Hard Mask for High Resolution Pattern Transfer
Marneffe, Jean-François de, Chan, Boon Teik, Spieser, Martin, Vereecke, Guy, Naumov, Sergej, Vanhaeren, Danielle, Wolf, Heiko, Knoll, Armin W.
Published in ACS nano (27.11.2018)
Published in ACS nano (27.11.2018)
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Journal Article
Defect Mitigation in Area‐Selective Atomic Layer Deposition of Ruthenium on Titanium Nitride/Dielectric Nanopatterns
Soethoudt, Job, Hody, Hubert, Spampinato, Valentina, Franquet, Alexis, Briggs, Basoene, Chan, Boon Teik, Delabie, Annelies
Published in Advanced materials interfaces (01.10.2019)
Published in Advanced materials interfaces (01.10.2019)
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Journal Article
Buried Power Rail Integration With FinFETs for Ultimate CMOS Scaling
Gupta, Anshul, Pedreira, Olalla Varela, Arutchelvan, Goutham, Zahedmanesh, Houman, Devriendt, Katia, Mertens, Hans, Tao, Zheng, Ritzenthaler, Romain, Wang, Shouhua, Radisic, Dunja, Kenis, Karine, Teugels, Lieve, Sebai, Farid, Lorant, Christophe, Jourdan, Nicolas, Chan, Boon Teik, Subramanian, Sujith, Schleicher, Filip, Hopf, Toby, Peter, Antony Premkumar, Rassoul, Nouredine, Debruyn, Haroen, Demonie, Ingrid, Siew, Yong Kong, Chiarella, Thomas, Briggs, Basoene, Zhou, Xiuju, Rosseel, Erik, De Keersgieter, An, Capogreco, Elena, Litta, Eugenio Dentoni, Boccardi, Guillaume, Baudot, Sylvain, Mannaert, Geert, Bontemps, Noemie, Sepulveda, A., Mertens, Sofie, Kim, Min-Soo, Dupuy, Emmanuel, Vandersmissen, Kevin, Paolillo, Sara, Yakimets, Dmitry, Chehab, Bilal, Favia, Paola, Drijbooms, Christel, Cousserier, Joris, Jaysankar, Manoj, Lazzarino, Frederic, Morin, Pierre, Altamirano, Efrain, Mitard, Jerome, Wilson, Christopher J., Holsteyns, Frank, Boemmels, Juergen, Demuynck, Steven, Tokei, Zsolt, Horiguchi, Naoto
Published in IEEE transactions on electron devices (01.12.2020)
Published in IEEE transactions on electron devices (01.12.2020)
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Journal Article
Challenges and Solutions of Replacement Metal Gate Patterning to Enable Gate-all-Around Device Scaling
Horiguchi, Naoto, Holsteyns, Frank, Oniki, Yusuke, Dentoni Litta, Eugenio, Ragnarsson, Lars Åke, Chan, Boon Teik, Hopf, Toby, Dekkers, Harold, Iino, Hideaki, Cott, Daire, Altamirano-Sanchez, Efrain, Sebaai, Farid
Published in Solid state phenomena (01.02.2021)
Published in Solid state phenomena (01.02.2021)
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Journal Article
On the effects of hydrogenation of thin film polycrystalline silicon: A key factor to improve heterojunction solar cells
Qiu, Yu, Kunz, Oliver, Fejfar, Antonin, Ledinsky, Martin, Chan, Boon Teik, Gordon, Ivan, Van Gestel, Dries, Venkatachalm, Srisaran, Egan, Renate
Published in Solar energy materials and solar cells (01.03.2014)
Published in Solar energy materials and solar cells (01.03.2014)
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Journal Article
Study of SF 6 /N 2 O Microwave Plasma for Surface Texturing of Multicrystalline (<150 µm) Solar Substrates
Chan, Boon Teik, Kunnen, Eddy, Uhlig, Matthias, Marneffe, Jean-Francois de, Xu, Kaidong, Boullart, Werner, Rau, Bernd, Poortmans, Jef
Published in Japanese Journal of Applied Physics (01.10.2012)
Published in Japanese Journal of Applied Physics (01.10.2012)
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Journal Article
Study of SF 6 /N 2 O Microwave Plasma for Surface Texturing of Multicrystalline (<150 µm) Solar Substrates
Chan, Boon Teik, Kunnen, Eddy, Uhlig, Matthias, Marneffe, Jean-Francois de, Xu, Kaidong, Boullart, Werner, Rau, Bernd, Poortmans, Jef
Published in Japanese Journal of Applied Physics (01.10.2012)
Published in Japanese Journal of Applied Physics (01.10.2012)
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Journal Article