Interlayer dielectric (ILD)-related edge channel effect in high density DRAM cell
KIM, Il-Gweon, KIM, Nam-Sung, CHOI, Se-Kyeong, YOUN, Tae-Un, JUNG, Hyuck-Chai, KWEON, Jae-Soon, CHUN, Young-Il, KIM, Wan-Soo, BONG, Myung-Jong, PARK, Joo-Seog
Published in Digest. International Electron Devices Meeting (2002)
Published in Digest. International Electron Devices Meeting (2002)
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