Design, fabrication and characterization of a piezoelectric MEMS diaphragm resonator mass sensor
Hu, Zhongxu, Hedley, John, Keegan, Neil, Spoors, Julia, Waugh, William, Gallacher, Barry, Boillot, François-Xavier, Collet, Joël, McNeil, Calum
Published in Journal of micromechanics and microengineering (01.12.2013)
Published in Journal of micromechanics and microengineering (01.12.2013)
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Journal Article
A MICRO-ELECTROMECHANICAL SYSTEM (MEMS) DEVICE
FRANCOIS-XAVIER BOILLOT, ANTOINE FILIPE, STEPHANE RENARD, JOEL COLLET
Year of Publication 29.11.2012
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Year of Publication 29.11.2012
Patent