MATERIAL FOR MANUFACTURING THIM-FILM INTERCONNECTING OF INTEGRATED CIRCUITS
LAPITSKIJ E.I.,SU, KOLESHKO V.M.,SU, BOCHVAR N.R.,SU, LYSOVA E.V.,SU, BELITSKIJ V.F.,SU
Year of Publication 07.10.1991
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Year of Publication 07.10.1991
Patent