Isolation process for surface micromachined sensors and actuators
JUN LIU LIAN, DOW FOO PANG, BO MAIO YU, SRIDHAR UPPILI, HONG LOH YONG
Year of Publication 16.11.1999
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Year of Publication 16.11.1999
Patent
Isolation process for surface micromachined sensors and actuators
HONG; LO YONG, BO; MAIO YU, SRIDHAR; UPPILI, JUN; LIU LIAN, DOW; FOO PANG
Year of Publication 27.07.1999
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Year of Publication 27.07.1999
Patent