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Year of Publication 16.04.2014
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Year of Publication 16.04.2014
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Mo/Si multilayer-coated amplitude-division beam splitters for XUV radiation sources
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Published in Journal of synchrotron radiation (01.03.2013)
Published in Journal of synchrotron radiation (01.03.2013)
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Journal Article
REFLECTIVE OPTICAL ELEMENT AND OPTICAL SYSTEM FOR EUV LITHOGRAPHY
EHM, Dirk Heinrich, MUELLENDER, Stephan, BLANCKENHAGEN, Gisela von, HUBER, Peter
Year of Publication 04.07.2018
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Year of Publication 04.07.2018
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Reflective optical element and optical system for EUV lithography
Huber, Peter, Von Blanckenhagen, Gisela, Muellender, Stephan, Ehm, Dirk Heinrich
Year of Publication 12.06.2018
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Year of Publication 12.06.2018
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