할로겐-함유 증착 억제제들을 사용하는 리세스된 피처들 내 금속들의 증착
KARIM ISHTAK, GRIFFITHS MATTHEW BERTRAM EDWARD, MANDIA DAVID JOSEPH, LAI CHIUKIN STEVEN, BLAKENEY KYLE JORDAN
Year of Publication 16.08.2024
Get full text
Year of Publication 16.08.2024
Patent
유기 공-반응 물질들 (CO-REACTANTS) 을 사용한 건식 증착된 포토레지스트들
WEIDMAN TIMOTHY WILLIAM, LIN QINGHUANG, HANSEN ERIC CALVIN, BLAKENEY KYLE JORDAN, WU CHENGHAO
Year of Publication 24.03.2023
Get full text
Year of Publication 24.03.2023
Patent
반도체 디바이스 제작시 실질적으로 탄소-프리 몰리브덴-함유 막들 및 텅스텐-함유 막들
LAI CHIUKIN STEVEN, STEVENS JASON, BLAKENEY KYLE JORDAN, PRATT THOMAS M, LENZ ERIC H
Year of Publication 22.04.2022
Get full text
Year of Publication 22.04.2022
Patent
금속 옥사이드 확산 배리어들
BROGAN LEE J, VAN CLEEMPUT PATRICK, HUIE MATTHEW MARTIN, LIU YI HUA, BLAKENEY KYLE JORDAN
Year of Publication 06.03.2023
Get full text
Year of Publication 06.03.2023
Patent
감광성 하이브리드 막들을 형성하는 방법
WEIDMAN TIMOTHY WILLIAM, VOLOSSKIY BORIS, PAN YANG, HANSEN ERIC CALVIN, BLAKENEY KYLE JORDAN, TAN SAMANTHA S.H, WU CHENGHAO, GU KEVIN LI, WISE RICHARD, NARDI KATIE LYNN, LIN QINGHUANG, LEE YOUNGHEE, LAVOIE ADRIEN, KANAKASABAPATHY SIVANANDA KRISHNAN
Year of Publication 17.04.2023
Get full text
Year of Publication 17.04.2023
Patent
METAL OXIDE DIFFUSION BARRIERS
BROGAN, Lee J, BLAKENEY, Kyle Jordan, VAN CLEEMPUT, Patrick A, HUIE, Matthew Martin, LIU, Yi Hua
Year of Publication 17.08.2023
Get full text
Year of Publication 17.08.2023
Patent
DRY DEPOSITED PHOTORESISTS WITH ORGANIC CO-REACTANTS
Hansen, Eric Calvin, Weidman, Timothy William, Wu, Chenghao, Lin, Qinghuang, Blakeney, Kyle Jordan
Year of Publication 17.08.2023
Get full text
Year of Publication 17.08.2023
Patent